Torsional Moving Electric Field Sensor with Modulated Sensitivity and without Reference Ground

Liyanage, Sampath; Shafai, Cyrus; Chen, Tao; Rajapakse, Athula D.

doi:10.3390/proceedings1040350

Cited by 9 publications

(6 citation statements)

References 5 publications

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“…An initial study of the theory of the vertical moving shutter's ability to modulate the incident electric field was presented in [22]. This paper expands on this early work by improving the design of its actuators and ground lines as well as adding serpentine springs.…”

Section: Presented Papermentioning

confidence: 95%

“…Torsional vertical tilting shutter electrostatic force sensors were also developed to reduce the self-charging effect [21]. The MEMS dc electric field sensor developed by Liyanage et al [22] employed a pair of electrodes on a torsional tilting platform, that was biased by two sinusoidal signals with opposing phases. When the sensor was exposed to an external electric field, the platform tilts due to the differential force across the platform surface.…”

Section: Vertical and Electrostatic Force-based Mefm Designsmentioning

confidence: 99%

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Study of the shielding effect of a vertical moving shutter micromachined field mill for measuring dc electric field

Afsharipour¹,

Chen²,

Zhou³

et al. 2020

Meas. Sci. Technol.

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This paper presents the results of studying the shielding effect of a vertical moving shutter micromachined electric field mill. In this design, a set of interdigital sensing electrodes are located in the same plane as the moving shutter, with the shutter's vertical motion enabling modulation of the sensed electric field. The effects of various geometrical parameters of the shutter, including the spacing between the fingers and their width, were simulated to study the collected charge as a function of shutter displacement. For the cases with shutter finger spacings 1.5 to 2 times finger-widths, when the shutter lifted up to a height equal to the comb finger-width, the electrode signal dropped by approximately 22-26%. When the shutter lowered for a height equal to finger-width, the charge increased by approximately 24%. To verify the results of the simulations, one shutter design was selected and fabricated. Thermal actuators were employed to move the shutter vertically, in order to study the shutter shielding effect as a function of displacement. The sensor's mechanical performance test demonstrated 25 µm of displacement when heated to 100 • C. The electric field sensing functionality of the sensor was also tested under an electric field of 9.4 kV m −1 . The vertical motion of the shutter successfully demonstrated its ability to vary the field on the sensing electrodes. An output voltage of 7 ± 0.5 µV was measured per oscillation of the 1.3 × 2 mm shutter for a 25 µm movement. The sensor demonstrated a sensitivity of 0.74 mV kV −1 m −1 .

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Section: Presented Papermentioning

confidence: 95%

Section: Vertical and Electrostatic Force-based Mefm Designsmentioning

confidence: 99%

Study of the shielding effect of a vertical moving shutter micromachined field mill for measuring dc electric field

Afsharipour¹,

Chen²,

Zhou³

et al. 2020

Meas. Sci. Technol.

Self Cite

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“…In contrast, active force-based sensors (compare figure 2(b)) generate the charges by a voltage source [19][20][21]. The resulting force in this case is proportional to the voltage and to the electric field with all its components.…”

Section: Principlesmentioning

confidence: 99%

Review on sensors for electric fields near power transmission systems

Hortschitz,

Kainz,

Beigelbeck

et al. 2024

Meas. Sci. Technol.

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Due to the necessary transition to renewable energy, the transport of electricity over long distances will become increasingly important, since the sites of sustainable electricity generation, such as wind or solar power parks, and the place of consumption can be very far apart. Currently, electricity is mainly transported via overhead AC lines. However, studies have shown that for long distances, transport via DC offers decisive advantages. To make optimal use of the existing route infrastructure, simultaneous AC and DC, or hybrid transmission, should be employed. The resulting electric field strengths must not exceed legally prescribed thresholds to avoid potentially harmful effects on humans and the environment. However, accurate quantification of the resulting electric fields is a major challenge in this context, as they can be easily distorted (e.g., by the measurement equipment itself). Nonetheless knowledge of the undisturbed field strengths from DC up to several multiples of the fundamental frequency of the power-grid (up to 1\,kHz) is required to ensure compliance with the thresholds. Both AC and DC electric fields can result in the generation of corona ions in the vicinity of the line. In the case of pure AC fields, the corona ions generated typically recombine in the immediate vicinity of the line and, therefore, have no influence on the field measurement further away. Unfortunately, this assumption does not hold for DC fields and hybrid fields, where corona ions can be transported far away from the line (e.g., by wind), and potentially interact with the measurement equipment yielding incorrect measurement results. This review will provide a comprehensive overview of the current state-of-the-art technologies and methods which have been developed to address the problems of measuring the electric field near hybrid power lines.

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“…The University of Manitoba in Canada presented a series of field mill MEMS electric sensors using thermal actuators, including early structures with horizontal move of shielding electrodes [19,20] and later structures with vertical move of shielding electrodes [21,22]. Besides, they also proposed a kind of field drive MEMS electric field sensors with a movable conductive membrane mirror suspended by a set of micro-springs [23][24][25]. The displacement of the membrane mirror driven by the electrostatic force of external electric field was detected by photodetector to realize the distortion-free sensing of the electric field.…”

Section: Introductionmentioning

confidence: 99%

Electric field sensing characteristics of ZnO/SiO₂/Si surface acoustic wave devices

Liu¹,

Zhu²,

Xu³

et al. 2022

J. Micromech. Microeng.

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Existing MEMS (Microelectro Mechanical Systems) electric field sensors have movable parts and electronic components. The movable parts are susceptible to external vibration, and the electronic components distort the distribution of the measured electric field. Therefore, we proposed a novel MEMS electric field sensor based on Surface Acoustic Wave (SAW) technology. The SAW electric field sensor is a delay line device with an interdigital transducer and a reflector. The substrate of the device is a ZnO/SiO2/Si multilayer structure. The ZnO piezoelectric layer is not only used as the propagation medium of SAW, but also used as the sensing film of the external electric field. Then, the external electric field could be detected by analyzing the change of the eigenfrequency of the SAW. The multilayer structure of the substrate was prepared by MEMS process. The interdigital transducer and the reflector are fabricated by the lift-off process. The SAW sensor is characterized at different external electric field strengths by a network analyzer. The sensitivity of the sensor was 0.23 kHz/(kV·m-1) and the nonlinearity was 6.8%.

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Torsional Moving Electric Field Sensor with Modulated Sensitivity and without Reference Ground

Cited by 9 publications

References 5 publications

Study of the shielding effect of a vertical moving shutter micromachined field mill for measuring dc electric field

Study of the shielding effect of a vertical moving shutter micromachined field mill for measuring dc electric field

Review on sensors for electric fields near power transmission systems

Electric field sensing characteristics of ZnO/SiO₂/Si surface acoustic wave devices

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Torsional Moving Electric Field Sensor with Modulated Sensitivity and without Reference Ground

Cited by 9 publications

References 5 publications

Study of the shielding effect of a vertical moving shutter micromachined field mill for measuring dc electric field

Study of the shielding effect of a vertical moving shutter micromachined field mill for measuring dc electric field

Review on sensors for electric fields near power transmission systems

Electric field sensing characteristics of ZnO/SiO2/Si surface acoustic wave devices

Contact Info

Product

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Electric field sensing characteristics of ZnO/SiO₂/Si surface acoustic wave devices