“…Currently, as one of the important detection principles of MEMS sensors, thermal detection has been widely used in fluid sensing fields, especially in gas-related detection, such as gas flow [ 1 , 2 , 3 ], thermal conductivity [ 4 , 5 , 6 ], shear-stress [ 7 , 8 , 9 ], and vacuum [ 10 , 11 , 12 ], etc. Compared to normal chemical sensors, thermal MEMS sensors have the advantages of broad-spectrum, fast response, low power consumption, and long-term stability, becoming a major, long-standing research focus [ 13 , 14 , 15 ].…”