2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) 2024
DOI: 10.1109/mems58180.2024.10439304
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Toward High-Bit-Rate CMOS-MEMS Resoswitches

Cheng-Ming Lee,
Ting-Jui Liou,
Chun-Pu Tsai
et al.
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