2012
DOI: 10.1177/1045389x12445031
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Toward mechano-spintronics: Nanostructured magnetic multilayers for the realization of microcantilever sensors featuring wireless actuation for liquid environments

Abstract: Silicon microcantilevers are realized and tested using different ferromagnetic thin films as active actuators. The exploited design is optimized for operating the sensor in a liquid environment. Different magnetic materials are used as actuator elements: a soft layer of face-centered cubic Co, a hard layer of Co80Cr20 (subscript: atomic composition in percentage) and a ((CoCu10)-Cu-5)(5) multilayer (superscript: thickness; subscript: number of repetitions). The thin film magnetizations are characterized both i… Show more

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Cited by 9 publications
(4 citation statements)
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“…Among further examples of individual sensor solutions, MEMS/NEMS techniques show their potential when Ergenemann et al (2012) as well as Chiolerio et al (2012) discuss magnetic micro-cantilever-based devices, for example, for applications in chemical or biosensing.…”
Section: Implications Of Materials Adaptivity For Component Designmentioning
confidence: 99%
“…Among further examples of individual sensor solutions, MEMS/NEMS techniques show their potential when Ergenemann et al (2012) as well as Chiolerio et al (2012) discuss magnetic micro-cantilever-based devices, for example, for applications in chemical or biosensing.…”
Section: Implications Of Materials Adaptivity For Component Designmentioning
confidence: 99%
“…Recent progress in spintronics has led to the detection of various spin-mechanical interactions, but most of them are related to feeble forces [13][14][15][16][17][18]. Recently, there have been reports of magnetic material driven by spin-currents [19].…”
Section: Introductionmentioning
confidence: 99%
“…Templates based on porous anodic alumina are commonly used for the fabrication of new nanostructured composites based on nanoscale structures. Such nanostructures are widespread due to their unique chemical and physical properties [16][17][18][19][20][21][22]. The full extent of anodic alumina template usage in forming nanostructured materials is discussed in the review article [17].…”
Section: Introductionmentioning
confidence: 99%