2014
DOI: 10.7567/jjap.53.087201
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Towards a better understanding of the electrical contact formation process of the metal contact for DC MEMS/NEMS switches with statistical means

Abstract: The impact of the presence of alien hydrocarbon film on the electrical contact formation process between Au-to-Au surfaces has been studied for DC MEMS switches with statistical means. Based on the Poisson analysis, it is suggested that the electrical conduction in the alien film follows a typical weakest-link principle. The roles of electrical field and contamination film thickness are studied under a framework of Weibull distribution. The establishment of stable electrical contact is found to be inherent to … Show more

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