Towards a continuous frequency band chirp material measure for surface topography measuring instrument calibration

Eifler, Matthias; Hering, Julian; Keksel, Andrej; Freymann, Georg von; Seewig, Jörg

doi:10.1117/12.2591935

Cited by 3 publications

(4 citation statements)

References 17 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The additive manufacturing of multiple material measures onto one substrate is possible with direct laser writing (DLW), as previously investigated in different studies [8,[31][32][33]. The advantage of this method is that it does not only allow the large design freedom which is common for additive manufacturing and the possibility to reproducibly manufacture structures with a dimension smaller than the structural resolution of typical industrial optical surface topography measuring instruments [31] but also in comparison to other additive manufacturing principle does not require the application of masks and covers the largest scales of feature size and printing velocity [34].…”

Section: Sample Manufacturingmentioning

confidence: 99%

“…The setup features a lateral spacing of 0.226 μm and a nominal vertical resolution of 2 nm. The structural resolution of the setup, representing the wavelength of the smallest structure that can be measured with an amplitude transmission of at least 50%, can be determined in the range of a few micrometers when a series of sine waves is fitted into a measured dataset [32] as suggested by the definition of the small scale fidelity limit [30].…”

Section: Measurementmentioning

confidence: 99%

“…With this circular chirp, a directional evaluation of the transfer behavior of the examined surface texture measuring instrument is possible. Also another areal extension of the profile chirp material measure was proposed: the trapezoidal chirp material measure [32] features continuously changing wavelengths orthogonal to the profile direction. This modified chirp material measure is mapped in four lateral directions.…”

Section: Introduction and State Of The Artmentioning

confidence: 99%

See 2 more Smart Citations

Comprehensive profile and areal calibration by additively manufactured material measures

Eifler,

Hering-Stratemeier,

von Freymann

et al. 2024

Surf. Topogr.: Metrol. Prop.

Self Cite

View full text Add to dashboard Cite

The calibration of surface texture measuring instruments is standardized with two distinct types of material measures. ISO 25178-70 categorizes material measures that feature a profile and an areal surface topography. The result is that different types of measuring instruments like profilers on the one hand and areal surface topography measuring instruments on the other hand may require different material measures whose scope of application may be limited to only one of the named instrument types. The reason is that most manufacturing principles allow either a linear or circular extrusion of a geometry limiting the possibilities to manufacture material measures that are suitable for both, profile and areal surface topography measuring instruments. Since a comparability is desired for as many different measuring instruments as possible, we examine to what degree profile and areal material measures of ISO 25178-70 can be adapted and combined to possibly allow a calibration of all types of surface topography measuring instruments. Additive manufacturing with direct laser writing (DLW) is characterized by a high degree of freedom in the design of material measures. An enhancement of structures that can be imaged either in multiple lateral directions or extruded to circular geometries is possible, allowing both, a profile sampling in different directions, just as well as an areal measurement. In the present publication, a modification of the ISO 25178-70 material measures is described including the design process, the manufacturing and the measurement with areal and profile surface topography measuring instruments to practically demonstrate the feasibility of a multifunctional calibration that considers the possible effects of directionality. We show that it is possible to combine different profile and areal geometries by linear and/or areal extrusion of the corresponding profile-based geometry. By aligning multiple material measures onto one sample, it can also be demonstrated that a comprehensive calibration of an optical profiler is enabled with only one measurement.

show abstract

Section: Sample Manufacturingmentioning

confidence: 99%

Section: Measurementmentioning

confidence: 99%

Section: Introduction and State Of The Artmentioning

confidence: 99%

See 1 more Smart Citation

Comprehensive profile and areal calibration by additively manufactured material measures

Eifler,

Hering-Stratemeier,

von Freymann

et al. 2024

Surf. Topogr.: Metrol. Prop.

Self Cite

View full text Add to dashboard Cite

show abstract

“…This areal modification of the chirp profile allows a directional analysis of the transfer characteristics of the surface topography measuring instrument. Another modification of the chirp material measure was designed and manufactured by the authors: the trapezoidal chirp material measure [25] maps a chirp material measure with continuously changing wavelengths orthogonal to the profile direction. This material measure is present in four different lateral directions.…”

Section: Introduction and State Of The Artmentioning

confidence: 99%

Compatibility analysis of profile and areal material measures

Eifler

Hering-Stratemeier

Freymann

et al. 2023

Optical Measurement Systems for Industrial Inspection XIII

View full text Add to dashboard Cite

The standardized material measures of ISO 25178-70 are categorized as either profile or areal surface geometry with regard to their application. This categorization limits many types of material measures to be only applicable to certain types of measuring instruments. To enable comparability and uncertainty estimation for many different types of measuring instruments, we examine the adaption of the either profile or areal assigned standardized material measures of ISO 25178-70 to multiple types of measuring instruments. For this enhancement the structures can be either imaged in different lateral directions, or changed to circular geometries that allow a sampling in different directions. The revised geometries are designed, manufactured, and measured to practically demonstrate the possibilities for a multifunctional calibration of different measuring instrument categories and to illustrate the effect of directionality on the results. Many types of material measures which are assigned to the calibration of profile measuring instruments can be enhanced to also allow a specific calibration of areal surface topography measuring instruments and the additional axes that is introduced hereby.

show abstract