Towards batch fabrication of bundled carbon nanotube thermal sensors

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Liu

et al. 2006

This paper focuses on nano-scale analysis of mechanical properties of polymer and carbon nanotubes (CNT) embedded MEMS devices using the probe tip of the Atomic Force Microscope (AFM). The mechanical properties of surfaces of layered materials were investigated by using nanoindentation produced with tips of an AFM. Experiment results indicated the bending characteristics of the device and could also indicate the Young's Modulus of the CNT embedded microstructure. Our objective is to investigate the change in nano-scale mechanical properties and piezoresistivity of bulk carbon nanotubes with the application of local probe manipulation.

Section: Introductionmentioning

confidence: 99%

Testing of MEMS Structure by Atomic Force Microscope

Fok

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Liu

et al. 2006

“…Accordingly, AC electrophoresis makes the batch fabrication of nano devices using nanotubes as components feasible. We have proven that carbon nanotube devices built by this method are capable of performing very low power thermal sensing (i.e., ~1000 times lower than conventional MEMS polysilicon based thermal sensors) and can be fabricated in a relatively fast and efficient manner [5]. The detailed process to manipulate nanotubes using AC electrophoresis and the experimental results from using the carbon nanotube bundles as thermal sensing elements will first be presented.…”

Section: Introductionmentioning

confidence: 99%

Towards Batch Fabrication of Carbon Nanotube Sensors by Combining Microinjection and Dielectrophoretic Manipulation

Lai

2004 IEEE International Conference on Robotics and Biomimetics

et al.

Self Cite

-We present the preliminary design and test results of a novel automated Carbon Nanotube (CNT) microinjection system for batch fabrication of a bulk multi-walled carbon nanotubes (MWNT) based sensors. This project will eventually develop an automated system to rapidly and precisely execute the AC electrophoretic manipulation of MWNT bundles on substrates that are used to fabricate nano-sensors. We have already shown that, using dielectrophoretic manipulation, CNTs were successfully and repeatably manipulated between microfabricated electrodes. The CNT devices were demonstrated to potentially serve as novel thermal sensors with low power consumption (~ W) and electronic circuit response of about 100 kHz in constant current mode operation. Besides, preliminary microinjection experiments were conducted which demonstrated the possibility of the automated microinjection of solution with spot size of ~200 m. Based on these experimental evidences, a feasible batch fabrication method for functional CNT sensors by using an automated injection system is under development. The system will ultimately reduce fabrication accuracy and time of nano sensing devices and potentially enable fully automated assembly of CNT and other nano-wire based devices.

Rapid assembly of carbon nanotubes for nanosensing by dielectrophoretic force

Chan

Li³

2004

Nanotechnology

The carbon nanotube (CNT) has been widely studied for its electrical, mechanical, and chemical properties since its discovery. However, to manipulate these nanosize tubes, atomic force microscopy (AFM) is typically used to manipulate them one-by-one. This is time-consuming and unrealistic for batch fabrication. In this paper, we will present the manipulation of carbon nanotubes using dielectrophoretic manipulation to rapidly build practical nanosensors. Thus far, we have demonstrated thermal sensors for temperature and fluid-flow measurements. We have also shown that this electrokinetic based manipulation technique is compatible with MEMS fabrication processes, and hence, MEMS structures embedded with carbon nanotube sensing elements can be built in the future with new functionalities.