2012 38th IEEE Photovoltaic Specialists Conference 2012
DOI: 10.1109/pvsc.2012.6318037
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Towards fabrication of low cost high efficiency c-Si solar cells: Progress and optimization using TCAD simulation study

Abstract: Progress of experimental and simulation work, in optimizing baseline processes for low cost, high efficiency c Si solar cells is presented. Phosphorous diffusion at 890°C for 15 minutes was optimized to a obtain sheet resistance of 30 n/D for selective emitter region. Active area of the cell, excluding areas of front metal contact grid, was selectively etched back to obtain emitter sheet resistance of 90 n/D for lightly doped emitter. Optimization of Boron diffusion for N-type solar cells was attempted. Partic… Show more

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Cited by 4 publications
(4 citation statements)
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“…60 The commercial technology computer-aided design (TCAD) software is suitable for the calculation of devices with multidimensional structures. 61 The representatives are Sentaurus TCAD provided by Synopsys Inc. 62 and Victory TCAD provided by Silvaco Inc. 63 These TCAD software include a process simulator, which enables a complete evaluation starting from the processing to the device characteristics. This review article is focused on device simulations.…”
Section: Softwaresmentioning
confidence: 99%
See 1 more Smart Citation
“…60 The commercial technology computer-aided design (TCAD) software is suitable for the calculation of devices with multidimensional structures. 61 The representatives are Sentaurus TCAD provided by Synopsys Inc. 62 and Victory TCAD provided by Silvaco Inc. 63 These TCAD software include a process simulator, which enables a complete evaluation starting from the processing to the device characteristics. This review article is focused on device simulations.…”
Section: Softwaresmentioning
confidence: 99%
“…The commercial technology computer‐aided design (TCAD) software is suitable for the calculation of devices with multidimensional structures 61 . The representatives are Sentaurus TCAD provided by Synopsys Inc 62 .…”
Section: Numerical Simulation Of C‐si Solar Cellsmentioning
confidence: 99%
“…However, the high efficiency of planar solar cell cost is still high compared to TFSCs [4,5]. Therefore, recent researches focus on fabricating silicon-based solar cells using cheap ways while achieving high efficiency [6][7][8][9]. One of the interesting ways to reduce the cell cost is by using a silicon nanorod.…”
Section: Introductionmentioning
confidence: 99%
“…Still, few research works have been done to fabricate silicon-based solar cells in a cheap way with a relatively high efficiency [6][7][8][9]. One of the most interesting attempts to get high efficiency low cost silicon-based cells is to use a nanorod with a high-doped pn junction in the radial direction [10,11].…”
Section: Introductionmentioning
confidence: 99%