Towards high quality ITO coatings: The impact of nitrogen admixture in HiPIMS discharges

Straňák, Vítězslav; Bogdanowicz, Robert; Sezemsky, Petr; Wulff, H.; Kruth, Angela; Śmietana, Mateusz; Kratochvíl, Jiří; Čada, Martin; Hubička, Zdeněk

doi:10.1016/j.surfcoat.2017.12.030

Cited by 18 publications

(4 citation statements)

References 53 publications

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“…The LMR-satisfying properties of non-annealed, as fabricated ITO films are attributed to unique advantages of the applied discharge during deposition process. Our previous research clearly showed that optimization of the deposition pressure 0.5 Pa < p < 1.0 Pa induces collisions of the sputtered particles [ 28 , 29 ]. The application of magnetron sputtering is advantageous and allows to tailor the optical and electrical properties of the deposited ITO films with no additional post-deposition annealing as it is often required in case of other deposition methods [ 30 ].…”

Section: Resultsmentioning

confidence: 99%

Optical Detection of Ketoprofen by Its Electropolymerization on an Indium Tin Oxide-Coated Optical Fiber Probe

Bogdanowicz

Niedziałkowski

Sobaszek

et al. 2018

Sensors

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In this work an application of optical fiber sensors for real-time optical monitoring of electrochemical deposition of ketoprofen during its anodic oxidation is discussed. The sensors were fabricated by reactive magnetron sputtering of indium tin oxide (ITO) on a 2.5 cm-long core of polymer-clad silica fibers. ITO tuned in optical properties and thickness allows for achieving a lossy-mode resonance (LMR) phenomenon and it can be simultaneously applied as an electrode in an electrochemical setup. The ITO-LMR electrode allows for optical monitoring of changes occurring at the electrode during electrochemical processing. The studies have shown that the ITO-LMR sensor’s spectral response strongly depends on electrochemical modification of its surface by ketoprofen. The effect can be applied for real-time detection of ketoprofen. The obtained sensitivities reached over 1400 nm/M (nm·mg−1·L) and 16,400 a.u./M (a.u.·mg−1·L) for resonance wavelength and transmission shifts, respectively. The proposed method is a valuable alternative for the analysis of ketoprofen within the concentration range of 0.25–250 μg mL−1, and allows for its determination at therapeutic and toxic levels. The proposed novel sensing approach provides a promising strategy for both optical and electrochemical detection of electrochemical modifications of ITO or its surface by various compounds.

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Section: Resultsmentioning

confidence: 99%

Optical Detection of Ketoprofen by Its Electropolymerization on an Indium Tin Oxide-Coated Optical Fiber Probe

Bogdanowicz

Niedziałkowski

Sobaszek

et al. 2018

Sensors

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“…Next, ITO overlays were deposited on the fibers using standard planar magnetron with unbalanced magnetic field. The deposition system used sputtering gun running in continuous RF power mode only and equipped with ITO target composed of In 2 O 3 −SnO 2 90–10 wt% and with purity of 99.99 % employing a similar concept as in our previous work . In this experiment, to increase RI sensitivity of the ITO‐LMR sensor, the overlay thickness was reduced to observe the lowest possible order of LMR resonances .…”

Section: Methodsmentioning

confidence: 99%

Study on Combined Optical and Electrochemical Analysis Using Indium‐tin‐oxide‐coated Optical Fiber Sensor

et al. 2019

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In this work an optical fiber sensor, where a lossy‐mode resonance (LMR) effect was obtained due to indium tin oxide (ITO) thin overlay, has been simultaneously applied as a working electrode in a 3‐electrode cyclic voltammetry electrochemical setup. Since LMR conditions highly depend on refractive index of a surrounding medium, an LMR‐based sensor was applied for optical investigations of electrolyte's properties at the ITO surface. We have found that the optical response of the sensor highly depends on the applied potential and its changes, as well as the properties of the investigated electrolyte, i. e., its composition and presence of a redox probe. Both optical and electrochemical response of the ITO‐LMR sensor to various concentrations of phosphate‐buffered saline (PBS), NaCl and Na2SO4, as well as scan rate were investigated and discussed. We have found that the responses in optical and electrical domains differ significantly and may deliver supplementary information about the investigated analyte.

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“…Recently, high power impulse magnetron sputtering (HiPIMS) is emerging as a method for deposition of metal oxide films, including ITO films [13][14][15][16][17]. The high power impulses can generate high-density plasma containing highly excited/ionized sputtered species and reactive agents (oxygen radicals), favoring the synthesis of compounds.…”

Section: Introductionmentioning

confidence: 99%

Role of Ambient Hydrogen in HiPIMS-ITO Film during Annealing Process in a Large Temperature Range

et al. 2022

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Indium tin oxide (ITO) thin films were prepared by high power impulse magnetron sputtering (HiPIMS) and annealed in hydrogen-containing forming gas to reduce the film resistivity. The film resistivity reduces by nearly an order of magnitude from 5.6 × 10−3 Ω·cm for the as-deposited film to the lowest value of 6.7 × 10−4 Ω·cm after annealed at 700 °C for 40 min. The role of hydrogen (H) in changing the film properties was explored and discussed in a large temperature range (300–800 °C). When annealed at a low temperature of 300–500 °C, the incorporated H atoms occupied the oxygen sites (Ho), acting as shallow donors that contribute to the increase of carrier concentration, leading to the decrease of film resistivity. When annealed at an intermediate temperature of 500–700 °C, the Ho defects are thermally unstable and decay upon annealing, leading to the reduction of carrier concentration. However, the film resistivity keeps decreasing due to the increase in carrier mobility. Meanwhile, some locally distributed metallic clusters formed due to the reduction effect of H2. When annealed at a high temperature of 700–800 °C, the metal oxide film is severely reduced and transforms to gaseous metal hydride, leading to the dramatic reduction of film thickness and carrier mobility at 750 °C and vanish of the film at 800 °C.

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Towards high quality ITO coatings: The impact of nitrogen admixture in HiPIMS discharges

Cited by 18 publications

References 53 publications

Optical Detection of Ketoprofen by Its Electropolymerization on an Indium Tin Oxide-Coated Optical Fiber Probe

Optical Detection of Ketoprofen by Its Electropolymerization on an Indium Tin Oxide-Coated Optical Fiber Probe

Study on Combined Optical and Electrochemical Analysis Using Indium‐tin‐oxide‐coated Optical Fiber Sensor

Role of Ambient Hydrogen in HiPIMS-ITO Film during Annealing Process in a Large Temperature Range

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