2004 Solid-State, Actuators, and Microsystems Workshop Technical Digest 2004
DOI: 10.31438/trf.hh2004.55
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Towards Integrated Micro-Machined Silicon-Based Nanopores for Characterization of Dna

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Cited by 3 publications
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“…Recent reports of the use of ion milling 7 and transmission electron beam imaging , with real time feedback to form controlled pore size have paved the way to begin the exploration of single DNA molecule translocations and conformational studies using artificial pores. The electronic signature of dsDNA moving through these nanopores can be quite complex and the conformational changes in the molecule cannot be ignored, as shown recently by Li et al One possibility to suppress signatures due to conformational changes is to increase the entropic energy barrier for molecules to enter the nanopore by the use of “channels” with nanoscale diameters .…”
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confidence: 99%
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“…Recent reports of the use of ion milling 7 and transmission electron beam imaging , with real time feedback to form controlled pore size have paved the way to begin the exploration of single DNA molecule translocations and conformational studies using artificial pores. The electronic signature of dsDNA moving through these nanopores can be quite complex and the conformational changes in the molecule cannot be ignored, as shown recently by Li et al One possibility to suppress signatures due to conformational changes is to increase the entropic energy barrier for molecules to enter the nanopore by the use of “channels” with nanoscale diameters .…”
mentioning
confidence: 99%
“…The electronic signature of dsDNA moving through these nanopores can be quite complex and the conformational changes in the molecule cannot be ignored, as shown recently by Li et al One possibility to suppress signatures due to conformational changes is to increase the entropic energy barrier for molecules to enter the nanopore by the use of “channels” with nanoscale diameters . We fabricated 50−60 nm long, 4−5 nm diameter nanopore channels in micromachined silicon membranes . The nanopore channels were fabricated with a process similar to one described earlier 15 and commenced with double polished SOI wafers .…”
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“…However, their mechanism was completely different from Li's process. In this process, the e-beam locally fluidized the oxide around the pore, and hence oxide flowed towards the pore and then filled it (22). Figure 2 shows a final TEM image of a typical NPC (20).…”
Section: Solid-state Nanoporesmentioning
confidence: 99%