Nano Online 2017
DOI: 10.1515/nano.0034.2016-0029
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Towards low energy consumption data storage era using phase-change probe memory with TiN bottom electrode

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Cited by 3 publications
(4 citation statements)
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“…In contrast, for the right gray region, these optimum parameters varied from 140 Ω −1 ·m −1 to 160 Ω −1 ·m −1 , and from 4.5 nm to 5 nm. Undoubtedly, to design a practicable device, the values of these characteristic parameters are pertinent to the inherent properties of materials which suggest that a thicker DLC layer usually exhibits a higher electrical conductivity [ 17 ]. Additionally, recent literature has reported that the electrical conductivity of a 5 nm DLC capping layer, when subjected to Joule heating, can sharply increase to 140 Ω −1 ·m −1 [ 18 , 19 ]; in contrast, a DLC capping layer with an electrical conductivity of 140 Ω −1 ·m −1 and a thickness of 5 nm appears to be a satisfying configuration that can simultaneously meet the temperature requirements for amorphization as well as the practicable measurements.…”
Section: Resultsmentioning
confidence: 99%
“…In contrast, for the right gray region, these optimum parameters varied from 140 Ω −1 ·m −1 to 160 Ω −1 ·m −1 , and from 4.5 nm to 5 nm. Undoubtedly, to design a practicable device, the values of these characteristic parameters are pertinent to the inherent properties of materials which suggest that a thicker DLC layer usually exhibits a higher electrical conductivity [ 17 ]. Additionally, recent literature has reported that the electrical conductivity of a 5 nm DLC capping layer, when subjected to Joule heating, can sharply increase to 140 Ω −1 ·m −1 [ 18 , 19 ]; in contrast, a DLC capping layer with an electrical conductivity of 140 Ω −1 ·m −1 and a thickness of 5 nm appears to be a satisfying configuration that can simultaneously meet the temperature requirements for amorphization as well as the practicable measurements.…”
Section: Resultsmentioning
confidence: 99%
“…However, the bottom layer is commonly desired to have large electrical conductivity and low thermal conductivity to provide adequate current density and reduce heat dissipation towards substrate [97]. Several bottom electrodes with different compositions such as diamond-like carbon (DLC) [99], metal [100], and TiN [101], [102], have been implemented in the past. The thermal conductivity of the DLC layer can be experimentally minimized to 0.2 Wm −1 K −1 [103], giving rise to a good thermal insulation effect.…”
Section: Phase-change Memoriesmentioning
confidence: 99%
“…Thus, in most studies, an optimized capping layer was designed as a DLC film with a thickness of 2–5 nm, an electrical conductivity of 50–100 Ω −1 ⋅m −1 , and a thermal conductivity of 0.2–0.5 W⋅m −1 ⋅K −1 . However, it was recently reported that DLC thin films exhibits strong thickness-dependent electrical conductivity [ 29 ], as illustrated in Figure 8 .…”
Section: Design Approaches Review Of Phase-change Electrical Probementioning
confidence: 99%
“… The dependence of the DLC film thickness on its electrical resistivity. Reprinted with permission from [ 29 ]. Copyright De Gruyter, 2016.…”
Section: Figurementioning
confidence: 99%