Towards nanoreliability of sensors incorporating interfaces between single-walled carbon nanotubes and metals: molecular dynamics simulations and in situ experiments using electron microscopy

Hartmann, Steffen; Hermann, Sascha; Bonitz, Jens; Heggen, Marc; Holck, O.; Shaporin, Alexey; Mehner, Jan; Schulz, Stefan E.; Geßner, Thomas; Wunderle, Bernhard

doi:10.1016/j.mechatronics.2016.05.016

Cited by 4 publications

(3 citation statements)

References 59 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Still, large amounts of characterization and testing are required to characterize for device reliability. Such reliability tests can be achieved by the SCA, as, e.g., promoted by Meszmer et al Together with nanocharacterization, this gives insights into the nanoscopic failure mechanisms for CNT metal contacts …”

Section: Discussionmentioning

confidence: 97%

“…These range from gravity and weight‐utilizing bending devices, over membrane‐based pressure sensors with various forms of actuation, to cantilever structures being actuated by an AFM tip . Such cantilever actuation can be used to determine the maximum pull‐out force of CNTs from the metal contact for microscopic devices …”

Section: Cnt Strain Sensor Technologymentioning

confidence: 99%

See 1 more Smart Citation

Carbon Nanotubes for Mechanical Sensor Applications

Wagner

Blaudeck

Meszmer

et al. 2019

Physica Status Solidi (a)

Self Cite

View full text Add to dashboard Cite

Herein, the evolution of carbon nanotubes (CNTs) as functional material in nano‐ and microelectromechanical systems (N/MEMS) is featured. Introducing material morphologies for the CNTs in a homologue series (single CNTs—bundles, fibers, yarns—networks and thin films), different concepts for mechanical sensors based on the intrinsic and extrinsic properties of the CNT materials are introduced (piezoresistive effect, strain‐induced band bending, charge tunneling). In a rigorous theoretical treatment, the limits of the achievable sensor performance (i.e., gauge factor) are derived and discussed in the context of applications. A careful literature survey shows that highest sensitivity is reached for devices exploiting the intrinsic transport properties of single CNTs. For reliability tests of such sensor systems made from nanomaterials and classical MEMS, the specimen‐centered approach (SCA) is introduced to give viable insights into the structure property relationships and failure modes of CNT mechanical sensors. CNT actuation occurs on the macro‐, micro‐, and nanoscales via atomic force microscopy, electrostatic gating, integration in N/MEMS systems, or through substrate bending.

show abstract

Section: Discussionmentioning

confidence: 97%

Section: Cnt Strain Sensor Technologymentioning

confidence: 99%

Carbon Nanotubes for Mechanical Sensor Applications

Wagner

Blaudeck

Meszmer

et al. 2019

Physica Status Solidi (a)

Self Cite

View full text Add to dashboard Cite

show abstract

“…In the present article, we will highlight the developments in nanocharacterization for CNT and CNT‐based devices for 1) CNT‐based vertical interconnects, or vias (vertically aligned CNTs acting as nanostructured conductor); 2) CNT‐based field‐effect transistors (CNTFETs) with CNTs as planar semiconducting transistor channel; and 3) monolithic microelectromechanical systems (MEMS) with mechanical interfaces to integrate CNTs and other nanomaterials in hybrid NEMS. The latter can even act as an entirely new class of test platforms for the micro–nano interface …”

Section: Introductionmentioning

confidence: 99%

Advanced Characterization Methods for Electrical and Sensoric Components and Devices at the Micro and Nano Scales

Sheremet

Meszmer

Blaudeck

et al. 2019

Physica Status Solidi (a)

Self Cite

View full text Add to dashboard Cite

The present study covers the nanoanalysis methods for four key material characteristics: electrical and electronic properties, optical, stress and strain, and chemical composition. With the downsizing of the geometrical dimensions of the electronic, optoelectronic, and electromechanical devices from the micro to the nanoscale and the simultaneous increase in the functionality density, the previous generation of microanalysis methods is no longer sufficient. Therefore, the metrology of materials' properties with nanoscale resolution is a prerequisite in materials' research and development. The article reviews the standard analysis methods and focuses on the advanced methods with a nanoscale spatial resolution based on atomic force microscopy (AFM): current-sensing AFM (CS-AFM), Kelvin probe force microscopy (KPFM), and hybrid optical techniques coupled with AFM including tip-enhanced Raman spectroscopy (TERS), photothermal-induced resonance (PTIR) characterization methods (nano-Vis, nano-IR), and photo-induced force microscopy (PIFM). The simultaneous acquisition of multiple parameters (topography, charge and conductivity, stress and strain, and chemical composition) at the nanoscale is a key for exploring new research on structure-property relationships of nanostructured materials, such as carbon nanotubes (CNTs) and nano/microelectromechanical systems (N/MEMS). Advanced nanocharacterization techniques foster the design and development of new functional materials for flexible hybrid and smart applications.

show abstract

Special Issue: Multiphysics Modeling, Simulation and Experiments of Micro and Nanosystems

Lenczner

Rochus

2016

Mechatronics

View full text Add to dashboard Cite

Towards nanoreliability of sensors incorporating interfaces between single-walled carbon nanotubes and metals: molecular dynamics simulations and in situ experiments using electron microscopy

Cited by 4 publications

References 59 publications

Carbon Nanotubes for Mechanical Sensor Applications

Carbon Nanotubes for Mechanical Sensor Applications

Advanced Characterization Methods for Electrical and Sensoric Components and Devices at the Micro and Nano Scales

Special Issue: Multiphysics Modeling, Simulation and Experiments of Micro and Nanosystems

Contact Info

Product

Resources

About