2001
DOI: 10.1103/physrevb.64.161401
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Towards the fabrication of phosphorus qubits for a silicon quantum computer

Abstract: The quest to build a quantum computer has been inspired by the recognition of the formidable computational power such a device could offer. In particular silicon-based proposals, using the nuclear or electron spin of dopants as qubits, are attractive due to the long spin relaxation times involved, their scalability, and the ease of integration with existing silicon technology. Fabrication of such devices however requires atomic scale manipulation -an immense technological challenge. We demonstrate that it is p… Show more

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Cited by 192 publications
(151 citation statements)
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“…Using both higher PH 3 dose rates (10 −8 mbar chamber pressure) and total doses (∼ 3 L), we have noted the adsorption of PH 3 at single H desorption sites [21]. However, with the low dose rate and fluence used here (10 −9 mbar and 0.3 L) we have observed an almost complete absence of adsorption at single H desorption sites, with coverages approaching saturation in the larger lithographically defined desorption regions.…”
mentioning
confidence: 52%
“…Using both higher PH 3 dose rates (10 −8 mbar chamber pressure) and total doses (∼ 3 L), we have noted the adsorption of PH 3 at single H desorption sites [21]. However, with the low dose rate and fluence used here (10 −9 mbar and 0.3 L) we have observed an almost complete absence of adsorption at single H desorption sites, with coverages approaching saturation in the larger lithographically defined desorption regions.…”
mentioning
confidence: 52%
“…There are currently several exciting proposals to use the (001) surface of silicon for the construction of atomicscale electronic devices, including single electron transistors 1 , ultra-dense memories 2 and quantum computers 3,4 . However, since any random charge or spin defects in the vicinity of these devices could potentially destroy their operation, a thorough understanding of the nature of crystalline defects on this surface is essential.…”
Section: Introductionmentioning
confidence: 99%
“…The Si(111) surface is thus unique in that such a simple wet chemical treatment can produce an ideal H-passivated Si surface which is atomically flat and defect free [3]. In addition, the H-Si(100) surface has been utilized recently as a resist for controlling the placement of individual atoms [4,5]. Unfortunately H-passivated surfaces are sensitive to ambient conditions (oxidizes ∼ hours) and elevated temperatures (T ≥ 300 • C).…”
mentioning
confidence: 99%