Towards understanding the machining mechanism of the atomic force microscopy tip-based nanomilling process

Wang, Jiqiang; Yan, Yongda; Li, Zihan; Geng, Yanquan

doi:10.1016/j.ijmachtools.2021.103701

Cited by 81 publications

(19 citation statements)

References 49 publications

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“…The diffraction pattern that corresponds to the region, which is also provided in Figure 8(c), illustrates strong lattice diffraction. The result indicates a single-crystal structure [21].…”

Section: Subsurface Damage Of Nanochannelsmentioning

confidence: 89%

“…Qian et al [20] achieved the nondestructive fabrication of nanochannels on silicon using a tip-based tribochemistry induced direct nanomachining approach. Wang et al [21] investigated the subsurface damage of single-crystal silicon that was induced by tip-based nanomilling. They revealed the subsurface, including many dislocations, stacking faults and a layer of amorphous silicon.…”

Section: Introductionmentioning

confidence: 99%

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Study on the Vertical Ultrasonic Vibration-Assisted Nanomachining Process on Single-Crystal Silicon

Wang

Geng

Yan

et al. 2021

Journal of Manufacturing Science and Engineering

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Subsurface damage that is caused by mechanical machining is a major impediment to the widespread use of hard–brittle materials. Ultrasonic vibration-assisted macro- or micromachining could facilitate shallow subsurface damage compared with conventional machining. However, the subsurface damage that was induced by ultrasonic vibration-assisted nanomachining on hard–brittle silicon crystal has not yet been thoroughly investigated. In this study, we used a tip-based ultrasonic vibration-assisted nanoscratch approach to machine nanochannels on single-crystal silicon, to investigate the subsurface damage mechanism of the hard–brittle material during ductile-machining. The material removal state, morphology, and dimensions of the nanochannel, and the effect of subsurface damage on the scratch outcomes were studied. The materials were expelled in rubbing, plowing, and cutting mode in sequence with an increasing applied normal load and the silicon was significantly harder than the pristine material after plastic deformation. Transmission electron microscope analysis of the subsurface demonstrated that ultrasonic vibration-assisted nanoscratching led to larger subsurface damage compared with static scratching. The transmission electron microscopy results agreed with the Raman spectroscopy and molecular dynamic simulation. Our findings are important for instructing ultrasonic vibration-assisted machining of hard–brittle materials at the nanoscale level.

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Section: Subsurface Damage Of Nanochannelsmentioning

confidence: 89%

Section: Introductionmentioning

confidence: 99%

Study on the Vertical Ultrasonic Vibration-Assisted Nanomachining Process on Single-Crystal Silicon

Wang

Geng

Yan

et al. 2021

Journal of Manufacturing Science and Engineering

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“…In order to improve the quality and the shape of two- and three-dimensional nanostructures [ 17 , 18 ], the m-TBN has been coupled with additional support methods, such as ultrasonic vibrating [ 19 , 20 , 21 ], high tip temperature [ 22 , 23 , 24 ], rotation of the tip during the milling [ 25 , 26 ] and bias voltage [ 7 ]. However, these hybrid processes require more elaborated equipment and are slower and more complex than the conventional m-TBN techniques; in addition, they can target only specific materials [ 27 ].…”

Section: Introductionmentioning

confidence: 99%

Pulse-Atomic Force Lithography: A Powerful Nanofabrication Technique to Fabricate Constant and Varying-Depth Nanostructures

et al. 2022

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The widespread use of nanotechnology in different application fields, resulting in the integration of nanostructures in a plethora of devices, has addressed the research toward novel and easy-to-setup nanofabrication techniques to realize nanostructures with high spatial resolution and reproducibility. Owing to countless applications in molecular electronics, data storage, nanoelectromechanical, and systems for the Internet of Things, in recent decades, the scientific community has focused on developing methods suitable for nanopattern polymers. To this purpose, Atomic Force Microscopy-based nanolithographic techniques are effective methods that are relatively less complex and inexpensive than equally resolute and accurate techniques, such as Electron Beam lithography and Focused Ion Beam lithography. In this work, we propose an evolution of nanoindentation, named Pulse-Atomic Force Microscopy, to obtain continuous structures with a controlled depth profile, either constant or variable, on a polymer layer. Due to the modulation of the characteristics of voltage pulses fed to the AFM piezo-scanner and distance between nanoindentations, it was possible to indent sample surface with high spatial control and fabricate highly resolved 2.5D nanogrooves. That is the real strength of the proposed technique, as no other technique can achieve similar results in tailor-made graded nanogrooves without the need for additional manufacturing steps.

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“…There have been lots of previous studies on the tipbased nanomachining process, and the influences of various machining parameters on the machining results were studied. [16][17][18][19][20] However, the constant depth simulation mode is used for almost all the works. While, the AFM-tip based nanomachining method is a constant force processing mode, so the models established in the previous works are different from the actual processing situation.…”

Section: Introductionmentioning

confidence: 99%

Molecular Dynamics Simulations of Ripple Nanostructure Formation During Nanomachining via Atomic Force Microscopy

Geng

Jia

Yan

2022

Proceedings of the Institution of Mechanical Engineers, Part C:

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Molecular dynamics (MD) constant force simulation mode is first used to study the formation of the ripple nanostructures on the single-crystal copper surface by combining the topography generated by machined grooves with the accumulated pile-up material on the side of these grooves via a triangular pyramid atomic force microscopy (AFM) tip. Groove morphologies, lateral forces, the evolution of subsurface defects, and atomic flow laws generated by different machining parameters are discussed. Specifically, the normal load, the feed value between grooves, and the scratching direction significantly affect groove formation. The simulated morphologies of the ripple nanostructures indicate that groove consistency and symmetry increase with increasing feed, and an optimized feed for various normal loads can be determined. The interaction between adjacent grooves produces a variation in the lateral forces with the groove number and feed. This is mainly related to the evolution of subsurface defects, the atomic flow law, and the volume of material pile-ups. The distributions of subsurface defects affect the atomic flow directions, and the atomic flow laws determine groove formation. The simulations provide important guidance for ripple nanostructure fabrication on single-crystal copper surface via AFM tips.

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Towards understanding the machining mechanism of the atomic force microscopy tip-based nanomilling process

Cited by 81 publications

References 49 publications

Study on the Vertical Ultrasonic Vibration-Assisted Nanomachining Process on Single-Crystal Silicon

Study on the Vertical Ultrasonic Vibration-Assisted Nanomachining Process on Single-Crystal Silicon

Pulse-Atomic Force Lithography: A Powerful Nanofabrication Technique to Fabricate Constant and Varying-Depth Nanostructures

Molecular Dynamics Simulations of Ripple Nanostructure Formation During Nanomachining via Atomic Force Microscopy

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