Trans‐scale precision positioning stage without guideway based on inertial stick–slip driving

Abstract

In this work, a trans-scale precision positioning stage without guideway based on the inertial stick-slip driving is proposed, which can provide nano-scale resolution ratio and output long-range motion. The stage consists of an encapsulated piezoelectric actuator, a connection block, a base, a pair of ceramic bars, and magnets, and the volume is 25 mm × 17 mm × 13.5 mm. The structure and the principle are introduced in detail. To investigate the locomotion characteristics, a prototype is manufactured, and a series of experiments are carried out. The velocity can reach 13 mm/s when the driving frequency is 2.5 kHz and the resolution is 2 nm. The experimental results confirm that the prototype based on the inertial stick-slip driving is valid through magnets. The good linear relationships exist between the displacement curves and time under various driving voltages and frequencies.