“…In such packaging, a ball lens is one of the crucial elements relaying light between the edgeemitting components. To date, various ways of producing a micro lens at wafer-level such as thermal reflow of photoresist [4], glass [5], sol-gel glass [6], vacuum-reflow of glass [7], or molding [8,9], have been reported. However, most of these methods produce hemispherical lenses relaying light normal to the wafer, in other words, to surface-sensitive devices such as PDs (photodiode) or VCSELs (vertical cavity surface emitting laser) that are attached to the wafer.…”