Transfer durability and fidelity of hard release-agent-free replica mold by repetition of ultraviolet nanoimprint lithography

Tsuchiya, Junpei; Hiwasa, Shin; Taniguchi, Jun

doi:10.1016/j.mee.2018.02.025

Cited by 10 publications

(9 citation statements)

References 21 publications

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“…The first replica mold was fabricated [ 19 ] as follows: UV-curable resin, PAK-01-CL (Toyo Gosei Co., Ltd., Tokyo, Japan) was dropped on a Si master mold (Toppan Co., Ltd., Tokyo, Japan). PAK-01-CL is an acrylic base resin and a radical polymerization system.…”

Section: Methodsmentioning

confidence: 99%

“…Finally, a second replica mold was fabricated from the first replica mold through UV-NIL. Specifically, a release-agent-free high-hardness resin (PARQIT OEX-066-X1-3; Autex Co., Ltd., Tokyo, Japan) was used for its fabrication [ 19 ]. This resin exhibits a viscosity in the range of 60–150 mPa·s at 23 °C, a pencil hardness of 9H, and a Young’s modulus of 1305 MPa.…”

Section: Methodsmentioning

confidence: 99%

“…A UV dose of 50 J/cm 2 was provided by a UV lamp (Aicure UP50 (Panasonic Co.), wavelength: 365 nm). During UV irradiation, the mold was heated at 80 °C to promote curing [ 19 ]. After mold release, it was heated at 100 °C for 30 min to improve its mold release ability.…”

Section: Methodsmentioning

confidence: 99%

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Transfer Durability of Line-Patterned Replica Mold Made of High-Hardness UV-Curable Resin

2020

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Ultraviolet nanoimprint lithography (UV-NIL) requires high durability of the mold for the mass production of nanostructures. To evaluate the durability of a line-patterned replica mold made of high-hardness UV curable resin, repetitive transfer and contact angle measurements of the replica mold were carried out. In the line patterns, as the contact angle decreases due to repeated transfer, capillary action occurs, and water flows along them. Therefore, it can be said that a mold with a line pattern exhibits an anisotropic contact angle because these values vary depending on the direction of the contact angle measurement. Subsequently, these anisotropic characteristics were investigated. It was determined that it was possible to predict the lifetime of line-and-space molds over repeated transfers. As the transcription was repeated, the contact angle along the line patterns decreased significantly before becoming constant. Moreover, the contact angle across the line pattern decreased slowly while maintaining a high contact angle with respect to the contact angle along the line pattern. The contact angle then decreased linearly from approximately 90°. The mold was found to be macroscopically defect when the values of the contact angle along the line pattern and the contact angle across the line pattern were close. Predicting the mold’s lifetime could potentially lead to a shortened durability evaluation time and the avoidance of pattern defects.

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Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

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Transfer Durability of Line-Patterned Replica Mold Made of High-Hardness UV-Curable Resin

2020

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“…3(d)). To bake the replica mold, the antifouling component contained in the resin was precipitated on the surface [15]. A replica mold without antifouling properties was then fabricated using the same procedure in Figs.…”

Section: Methodsmentioning

confidence: 99%

“…It has high hardness (pencil hardness of 9H) and toughness after UV curing, and also contains an antifouling component [10][11][12][13]. Because of these mechanical properties, it is not necessary to use a release agent with this resin [14][15][16]. We prepared the resin with and without the antifouling component, and investigated the influence of the antifouling properties on the imprints.…”

Section: Introductionmentioning

confidence: 99%

Durability Evaluation of Antireflection Structure Replica Mold using High Hardness and Antifouling UV-curable Resin

Kawauchi

Hiwasa²,

Taniguchi

2019

J. Photopol. Sci. Technol.

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Moth-eye-structure replica mold was fabricated from a glassy carbon master mold by UV-NIL. New UV curable resin with high hardness and antifouling property was used. The motheye-structure was duplicated from the replica mold by use conventional UV curable resin for UV-NIL. Compared with the replica mold by use of a conventional release-agent-free UV curable resin, the moth-eye-structure of new replica mold had superior imprint durability. The reflectance of the imprinted film was below 1% for the 350th imprint. It was that the antifouling property was very important for prolonging life time of replica mold.

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On-Chip Drug Screening Technologies for Nanopharmaceutical and Nanomedicine Applications

Onbas

Bilginer

Yıldız

2020

Nanopharmaceuticals: Principles and Applications Vol. 1

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Transfer durability and fidelity of hard release-agent-free replica mold by repetition of ultraviolet nanoimprint lithography

Cited by 10 publications

References 21 publications

Transfer Durability of Line-Patterned Replica Mold Made of High-Hardness UV-Curable Resin

Transfer Durability of Line-Patterned Replica Mold Made of High-Hardness UV-Curable Resin

Durability Evaluation of Antireflection Structure Replica Mold using High Hardness and Antifouling UV-curable Resin

On-Chip Drug Screening Technologies for Nanopharmaceutical and Nanomedicine Applications

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