Transfer-Free Graphene Growth on Dielectric Substrates: A Review of the Growth Mechanism

Kaur, Gurjinder; Kavitha, K.; Lahiri, Indranil

doi:10.1080/10408436.2018.1433630

Cited by 19 publications

(17 citation statements)

References 239 publications

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“…The decrease in the number of graphene layers with increased CH 4 /H 2 gas flow ratio was observed in Figure 5 . It can be explained by competition between two processes: graphene growth due to the carbon-containing active species flux towards the surface [ 50 , 53 ] and etching of the carbon-carbon bonds by hydrogen [ 44 , 54 , 55 ]. If the CH 4 /H 2 ratio is too low, the etching reaction is much faster than the growth of the graphene layers [ 56 ].…”

Section: Discussionmentioning

confidence: 99%

Catalyst-Less and Transfer-Less Synthesis of Graphene on Si(100) Using Direct Microwave Plasma Enhanced Chemical Vapor Deposition and Protective Enclosures

et al. 2020

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In this study, graphene was synthesized on the Si(100) substrates via the use of direct microwave plasma-enhanced chemical vapor deposition (PECVD). Protective enclosures were applied to prevent excessive plasma etching of the growing graphene. The properties of synthesized graphene were investigated using Raman scattering spectroscopy and atomic force microscopy. Synthesis time, methane and hydrogen gas flow ratio, temperature, and plasma power effects were considered. The synthesized graphene exhibited n-type self-doping due to the charge transfer from Si(100). The presence of compressive stress was revealed in the synthesized graphene. It was presumed that induction of thermal stress took place during the synthesis process due to the large lattice mismatch between the growing graphene and the substrate. Importantly, it was demonstrated that continuous horizontal graphene layers can be directly grown on the Si(100) substrates if appropriate configuration of the protective enclosure is used in the microwave PECVD process.

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Section: Discussionmentioning

confidence: 99%

Catalyst-Less and Transfer-Less Synthesis of Graphene on Si(100) Using Direct Microwave Plasma Enhanced Chemical Vapor Deposition and Protective Enclosures

et al. 2020

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“…Although, in recent years some progress has been made [14], this task still remains rather challenging especially because it is needed to be implemented on the industrial scale. Correspondingly, a scalable deposition of highly crystalline sp 2 -hybridized carbon films onto dielectric and semiconductor support is eagerly awaited because it will open avenues towards fabrication of graphene-based photonic and optoelectronic devices [2,15,16].…”

Section: Introductionmentioning

confidence: 99%

Strong optical nonlinearity of ultrathin graphitic films synthesized on dielectric substrates

Kaplas

Babaeian

Cromey

et al. 2019

Applied Surface Science

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We propose and demonstrate a scalable technique to grow a thin polycrystalline graphitic film directly onto a fused silica substrate. The technique is based on the pyrolysis of a photoresist in the presence of a sacrificial 10 nm thick nickel catalyst layer. The synthesized graphitic film with a thickness of about 50 nm possesses almost constant 40% absorptance over visual and near infrared spectral regions. By using Raman characterization, third harmonic generation spectroscopy, and the Z-scan technique we perform a comparative study of the films pyrolyzed with and without a Ni catalyst. We show that the amorphous carbon dominates the linear and nonlinear optical properties of the resist film pyrolyzed without the Ni catalyst. In contrast, in presence of a Ni catalyst layer, the pyrolysis leads to a graphitic film that demonstrates a strong saturable absorption behavior at 1550 nm wavelength and has a nonlinear refractive index comparable with that of graphene. Thus, the developed, transfer-free synthesis technique provides an alternative route towards the controllable growth of wafer scale graphitic films on the dielectric substrates for photonics applications.

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“…Unlike the past studies [31][32][33][34][35][36][37] that aimed at producing defect-free graphene by using a thick metal catalyst (> 50 nm), our objective is to produce films containing specific structural defects because of the critical effect of defects on the electrochemical properties of carbon materials 17,26,[38][39][40][41][42][43][44][45][46][47] . In our experiments, we observed that the thickness of the metal catalyst had a noticeable effect on the density of structural defects in the resulting NG carbon material.…”

Section: Synthesis Of Ng Carbon Material the Illustrations Inmentioning

confidence: 99%

“…The primary focus of the early research on this material synthesis technique, however, has been on the production of bulk sp 2 hybridized carbon materials mostly for applications in energy storage [28][29][30] . A new direction, more relevant for building miniaturized sensors, has been to apply this technique for making mono-and few-layer graphene on dielectric-coated substrates [31][32][33][34][35][36][37] . The main focus of these studies has been to generate defect-free graphene materials, which are ideal for high-speed electronic switches, but not for electrochemical sensors, where the performance strongly depends on structural defects 17,26,[38][39][40][41][42][43][44][45][46][47] .…”

mentioning

confidence: 99%

Nano-engineering the material structure of preferentially oriented nano-graphitic carbon for making high-performance electrochemical micro-sensors

Cuniberto

Alharbi

et al. 2020

Sci Rep

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Direct synthesis of thin-film carbon nanomaterials on oxide-coated silicon substrates provides a viable pathway for building a dense array of miniaturized (micron-scale) electrochemical sensors with high performance. However, material synthesis generally involves many parameters, making material engineering based on trial and error highly inefficient. Here, we report a two-pronged strategy for producing engineered thin-film carbon nanomaterials that have a nano-graphitic structure. First, we introduce a variant of the metal-induced graphitization technique that generates micron-scale islands of nano-graphitic carbon materials directly on oxide-coated silicon substrates. A novel feature of our material synthesis is that, through substrate engineering, the orientation of graphitic planes within the film aligns preferentially with the silicon substrate. This feature allows us to use the Raman spectroscopy for quantifying structural properties of the sensor surface, where the electrochemical processes occur. Second, we find phenomenological models for predicting the amplitudes of the redox current and the sensor capacitance from the material structure, quantified by Raman. Our results indicate that the key to achieving high-performance micro-sensors from nano-graphitic carbon is to increase both the density of point defects and the size of the graphitic crystallites. Our study offers a viable strategy for building planar electrochemical micro-sensors with high-performance. Carbon materials are widely used in building electrochemical sensors for detecting biomolecules because of their favorable electrochemical activity, bio-compatibility, rich surface chemistry, and strong resistance to bio-fouling. In biomolecule sensing applications, it is desirable to implement a large-scale sensing system comprising many small (micron-sized) carbon electrodes with high packing density. However, such large-scale systems are challenging to implement. In particular, existing implementations are limited mainly to one or a handful of carbon electrodes 1-5. Significant progress has been made on the development of single-electrode micro-sensors from bulk carbon materials, such as carbon fibers 6,7 and nanotube yarns 8,9. However, the large cylindrical form of these materials (>5 μm diameter) limits them to the fabrication of single or small-array micro-sensors. Importantly, while past research on this topic has evaluated a wide variety of carbon-based materials for boosting the sensor performance, the search for an optimal carbon material is still ongoing 10-13. It is generally accepted that, in a carbon material, defects and functional groups influence the sensitivity and the charging current of carbon-based electrochemical

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Transfer-Free Graphene Growth on Dielectric Substrates: A Review of the Growth Mechanism

Cited by 19 publications

References 239 publications

Catalyst-Less and Transfer-Less Synthesis of Graphene on Si(100) Using Direct Microwave Plasma Enhanced Chemical Vapor Deposition and Protective Enclosures

Catalyst-Less and Transfer-Less Synthesis of Graphene on Si(100) Using Direct Microwave Plasma Enhanced Chemical Vapor Deposition and Protective Enclosures

Strong optical nonlinearity of ultrathin graphitic films synthesized on dielectric substrates

Nano-engineering the material structure of preferentially oriented nano-graphitic carbon for making high-performance electrochemical micro-sensors

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