Transfer Printing Technology as a Straightforward Method to Fabricate Chemical Sensors Based on Tin Dioxide Nanowires

Abstract

Metal oxide multi-nanowire-based chemical gas sensors were manufactured by a fast and simple transfer printing technology. A two-step method employing spray pyrolysis deposition and a thermal annealing process was used for SnO 2 nanowires fabrication. A polydimethylsiloxane stamp was used to transfer the SnO 2 nanowires on two different gas sensing devices—Si-based substrates and microhotplate-based platform chips. Both contained a metallic inter-digital electrode structure (IDES), on which the SnO 2 nanowires were transferred for realization of multi-NW gas sensor devices. The gas sensor devices show a very high response towards H 2 S down to the 10 ppb range. Furthermore, a good response towards CO has been achieved, where in particular the microhotplate-based devices exhibit almost no cross sensitivity to humidity.

Semiconductor Gas Sensors: Materials, Technology, Design, and Application

“…High sensitivity, fast response, and recovery for multiple cycles to H 2 were shown [ 155 ]. SnO 2 nanowire-based sensors with high sensitivity to H 2 S were obtained by transfer printing using a polymer-based stamp (polydimethylsiloxane-PDMS) [ 156 ]. SnO 2 nanowires were fabricated using a two-step method involving spray pyrolysis on the Si substrate.…”

Multiscale Transfer Printing via Shape Memory Polymer with High Adhesion and Modulus Switchability

“…29 Afterward, the elastomeric stamp is attached to a flexible receiver substrate and print the transferred pattern. 30,31 Researchers have developed various transfer printing technologies to enhance the stability of the patterning process, including sacrificial layer-assisted transfer printing 32−34 and mechanical-assisted transfer printing. 35−38 When it comes to the sacrificial layer-assisted transfer printing technology, wet etching could not be avoided to remove the sacrificial layer, which was added between pattern and donor substrate to weaken the interface adhesion for successful transfer.…”

“…Generally, an elastomeric stamp is attached to the surface of the pattern which is on a rigid donor substrate, and then pick the pattern up to finish the transfer process . Afterward, the elastomeric stamp is attached to a flexible receiver substrate and print the transferred pattern. , Researchers have developed various transfer printing technologies to enhance the stability of the patterning process, including sacrificial layer-assisted transfer printing − and mechanical-assisted transfer printing. − When it comes to the sacrificial layer-assisted transfer printing technology, wet etching could not be avoided to remove the sacrificial layer, which was added between pattern and donor substrate to weaken the interface adhesion for successful transfer. Consequently, the intervention of chemical solutions could lead to sample surface contamination and the wet etching process incurs significant time costs .…”