2018
DOI: 10.1002/adem.201800039
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Transient Liquid Phase Bonding of AlN to AlSiC for Durable Power Electronic Packages

Abstract: Conventional power electronic modules employ a direct bonded copper (DBC) substrate and multiple interface layers to dissipate heat. However, reliability issues arise due to the coefficient of thermal expansion (CTE) mismatch that exists between the metal, ceramic, and semiconductor materials in the conventional module. Significant performance enhancement can be achieved by eliminating the DBC and developing an integrated substrate/cold plate with a low CTE mismatch throughout the package. To address this need… Show more

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Cited by 20 publications
(6 citation statements)
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“…For instance, a local hot spot can be effectively cooled by using localized jet cooling. This study provides an insight into how much these three geometries can be effective in cooling the new AlN-AlSiC design being investigated by the authors [7].…”
Section: Resultsmentioning
confidence: 99%
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“…For instance, a local hot spot can be effectively cooled by using localized jet cooling. This study provides an insight into how much these three geometries can be effective in cooling the new AlN-AlSiC design being investigated by the authors [7].…”
Section: Resultsmentioning
confidence: 99%
“…In this new design, an AlN dielectric substrate is directly bonded to an AlSiC baseplate/heat sink that has a similar CTE, as shown in Fig. 1(b) using a transient liquid phase (TLP) bonding approach [7]. The minimization of the CTE mismatch between the two layers results in a lower probability of fatigue and aging failures.…”
Section: Introductionmentioning
confidence: 99%
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“…Leveraging process innovations, 42 it is conceivable that fabrication steps may be reduced to the processing of a single wafter for the all-Si EHF μ-Cooler configuration which would positively reduce costs associated with material and labor. Beyond such improvements, and building off this TEA, EHF μ-Cooler configurations built from other substrate systems, such as DBC substrates, 20 aluminum (Al), or AlSiC metal matrix composites, 56 might also be considered as part of next-step cost/weight reduction or performance metric improvement efforts. For example, the use of a DBC substrate may offset a significant portion of the most expensive (i.e., Si microfabrication) steps of the current EHF μ-Cooler fabrication schemes.…”
Section: Discussionmentioning
confidence: 99%
“…Packaging the power devices requires attachment to a substrate and electrical interconnection to the circuit tracing. The major attachment technologies include solders [27], silver-sintering [28], and transient liquid-phase bonding (TLPB) [29], [30]. Properties to consider during material selection include the melting temperature, thermal conductivity, as well as the CTE since this will affect performance degradation during thermal cycling.…”
Section: B Die Attachment and Interconnectionmentioning
confidence: 99%