“…Zinc oxide is one such material which has become a well-established sensor material owing to its easy synthesis procedure, good electrical properties and in particular its compatibility with Si leading to MEMS-based chemical sensors [14]. Many reports regarding the sensing of various gases and gas mixtures like H 2 [15,16], CO [17], NO 2 [18], ozone [15], acetone vapor [19], ethanol vapor [20], LPG [21,22] using ZnO nanostructures have been published recently. Due to its high surface to volume ratio the gas sensing properties of aligned ZnO nanorods are markedly better compared to their conventional thin film counterparts and they have the advantages of greater sensitivity, faster response, and lower operating temperatures (which is essentially useful in lowering the power requirements for possible integration with CMOS technology).…”