Transmission electron microscopy detection of microtexture variations and their effects on thin film stability

Harris, Karen E.; King, Alexander H.

doi:10.1007/bf02650372

Cited by 9 publications

(5 citation statements)

References 13 publications

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“…4 The two types of texture observed coexisting in our gold films are also found to be the principle texture components of aluminum alloy films prepared by different techniques. 5 It is possible that the "precise" texture (with the (111) directions accurately aligned to the film normal) and the "off-(ll 1))" texture (with the (111) directions inclined by an average of three to six degrees from the foil normal) can co-exist in aluminum films just as they do in gold.…”

Section: Introductionmentioning

confidence: 78%

Some further microstructural characteristics of face-centered cubic polycrystalline metal thin films

Singh

King

Dixit

1997

Journal of Elec Materi

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We have made detailed observations of gold thin films and commercial aluminum-copper alloy films, using transmission electron microscopy. All of the films embody a strong (111} fiber texture. We have measured the misorientation distributions for the grain boundaries in these films, and also determined the "grain boundary character distribution" in terms of the coincident site lattice model. We show that in spite of their apparent similarity, these films embody significant differences in terms of these measures.

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Section: Introductionmentioning

confidence: 78%

Some further microstructural characteristics of face-centered cubic polycrystalline metal thin films

Singh

King

Dixit

1997

Journal of Elec Materi

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“…The shapes of strong and weak texture regions that developed during annealingreflect the shape of topographical variations on the substrate surface. ,A detailed discussion of the development of these texture variations and their dependence on substrate topography has been presented elsewhere [9]. Strongly and weakly textured regions of the control specimen have different microstructures.…”

Section: Resultsmentioning

confidence: 99%

“…One might then conclude that the less precise texture is desirable in electronic applications where grain boundaries are undesirable. Unfortunately, we have also found that this is the structure most prone to the formation of hillocks, under certain conditions [9]. For films attached to substrates, other considerations (most notably stress) may be important if solute sources are used to control grain growth.…”

Section: Final Commentsmentioning

confidence: 97%

“…If all of the grains in a specimen are <111) oriented there is no growth advantage, and abnormal grain growth can be supressed [9]. When the surface of the film is in contact with another material, rather than being exposed to a vacuum, the interfacial energy, rather than the surface free energy, determines the formation of this type of texture.…”

Section: Texture Effectsmentioning

confidence: 99%

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The Use and Control of Grain Boundaries in Thin Films

King¹,

Harris²

1995

Canadian Metallurgical Quarterly

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Polycrystalline thin films are widely used in the electronics industry and in surface protection applications. For most cases, a single crystal film would be preferable but is too costly or simply impossible to achieve. Thus, the grain boundaries are regarded as a necessary evil. We discuss the behavior of grain boundaries during film formation, processing and utilization, illustrating beneficial as well as deleterious effects. Some potential strategies for the control of grain boundary behavior are derived by the application of basic interfacial science.Resume-L'utilisation de films finspolycristallins est largement repandue dans l'industrie electronique et dans les applications de protection de surfaces. Dans la plupart des cas, un film monocristallin serait preferable, mais ceci est en fait trop couteux et bien trop difficile a realiser, alors les grains sont per9us comme une necessite malencontreuse. Nous considerons Ie comportement des joints des grains durant la formation, Ie traitement et l'utilisation des films, en illustrant tout aussi bien les effets benefiques que nuisibles. Nous avons tire une strategie potentielle pour Ie contr61e du comportement des joints de grains par l'application de la science fondamentale des interfaces.

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“…This procedure is similar to conical dark field imaging which has been shown to provide'microtextural information over large areas. 3 Apertures were fabricated using a FEI FIB-200 focused ion beam (FIB) workstation. Bitmap templates of apertures were created using Adobe Illustrator™ and converted to stream files.…”

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confidence: 99%

Microtextural Characterization and Orientational Mapping of Polycrystalline Thin Films Using TEM Dark Field Imaging Through an Annular Objective Aperture

Williamson¹,

Hull²,

Dunn³

et al. 1999

Microsc Microanal

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Several methods have been applied to the texture characterization of polycrystalline films, including X-ray diffraction and several SEM and TEM techniques. Few of these techniques combine high spatial resolution with the ability to characterize large sample areas in a short time. We have fabricated annular objective apertures for the TEM, extending earlier work of Heinemann and Poppa, to characterize the orientation and size of grains within polycrystalline thin films. This procedure is similar to conical dark field imaging which has been shown to provide microtextural information over large areasApertures were fabricated using a FEI FIB-200 focused ion beam (FIB) workstation. Bitmap templates of apertures were created using Adobe Illustrator™ and converted to stream files. These stream files were then used to controllably cut annular apertures into an existing platinum JEOL aperture strip with a 30 keV Ga+ FIB. The apertures were then placed in the objective aperture drive of a JEOL 2000FX transmission electron microscope and TiN thin films were imaged in bright- and dark-field imaging modes.

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Transmission electron microscopy detection of microtexture variations and their effects on thin film stability

Cited by 9 publications

References 13 publications

Some further microstructural characteristics of face-centered cubic polycrystalline metal thin films

Some further microstructural characteristics of face-centered cubic polycrystalline metal thin films

The Use and Control of Grain Boundaries in Thin Films

Microtextural Characterization and Orientational Mapping of Polycrystalline Thin Films Using TEM Dark Field Imaging Through an Annular Objective Aperture

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