Single crystals of silicon grown in an argon atmosphere were irradiakd with three different neutron doses: 6 x 3.6 x IO" and 1.2 x IO" cm-'. Positron annihilation spemscopy indicates that there xe two distinct annealing stages of V-type defects in the three neutron-irradiated silicon samples: one at about 200 OC and another at about 5 0 0 T The former is due to the annealing out of P-V and (Vl-0)-complexes; the latter is due to the annealing out of (Vz-0)" complexes. For samples irradiated with two different higher neutron doses, the intensity due to the radiation-induced monovacancy-type defects is above 5 8 9 and disappears at SSO'C, the intensity due to the radiation-induced divacancies is above 239, increases above 2UO' C and disappem at 600650°C. For the sample irradiated with a lower neumn dose the intensity due to the divacancies is only 7.31, it disappws below 200 T, and no secondruy divacancies appem. The intensity due to the secondary divaeancies is highly dependent on the neutron dose. There are two annealing stlges of Vz-type defects at 150-200 ' C and about 6 M ) T . The former is due to the approach of interstitial siliwn atoms to divacancies localized in the wres of neutron-radiation-disordered regions, and the latter is due to anneding out of divacancies in the 'undisturbed' matrix of the silicon crystal and V3-0 complexes. For samples irradiated with two different higher neutron doses, monovamcy-type defecls with higher intensities appear again at 600650'C which indicates the nature of the '600-650"C acceptor'. Above 7M)"C. many dislocations with 231 PS 6 r < 239 ps (sometimes both dislocations and monovacancytype defects (240 ps Q T C 266 PS)). are formed, especially far samples irradiated with higher neutron doses,