Transmission grating arrays for the X-ray spectrometer on Arcus Probe

Heilmann, Ralf K.; Bruccoleri, Alexander R.; Gregory, James A.; Gullikson, Eric M.; Günther, Hans Moritz; Hertz, Edward; Lambert, Renee D.; Young, Douglas J.; Schattenburg, Mark L.

doi:10.1117/1.jatis.11.1.011004

Cited by 2 publications

References 32 publications

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Improved efficiency critical-angle transmission gratings for high-resolution soft x-ray spectroscopy

Heilmann,

Bruccoleri,

Gullikson

et al. 2024

Space Telescopes and Instrumentation 2024: Ultraviolet to Gamma Ray

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High resolving power soft x-ray spectroscopy has been confirmed by the Astro2020 Decadal Survey as a highpriority strategic measurement technique with resolving power R = λ/∆λ up to 7500 for some science cases. Examples are the characterization of highly ionized gases in galaxy halos and within and around galaxy clusters, accretion onto supermassive black holes, stellar coronal mass ejections and coronal heating. Arcus, a recently proposed high-resolution x-ray and FUV grating spectrometer Probe class mission, exceeds current capabilities by far, with a minimum R of 2500 (∼ 3500 expected) and effective area up to 500 cm 2 in the 10-50 Å band, covered by the X-ray Spectrometer (XRS) instrument. The XRS relies on light-weight, high-efficiency, blazed and alignment-insensitive critical-angle transmission (CAT) gratings for dispersion and calls for hundreds of ∼ 30 × 30 mm 2 gratings. Recent gratings have been fabricated from 200-mm silicon-on-insulator (SOI) wafers using commercial tools from the semiconductor and MEMS industries compatible with volume production. Previously we reported x-ray results from quasi-fully illuminated co-aligned CAT gratings showing record-high R up to 1.3 × 10 4 in 18 th and 21 st diffraction orders at Al-K (∼ 1.5 keV), and diffraction efficiency in agreement with synchrotron measurements and model predictions at O-K. We were recently able to chemically reduce the width of the freestanding, 200 nm-period, ultra-high aspect ratio CAT grating bars post-fabrication, and we report on the resulting increase in diffraction efficiency.

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Improved efficiency critical-angle transmission gratings for high-resolution soft x-ray spectroscopy

Heilmann,

Bruccoleri,

Gullikson

et al. 2024

Space Telescopes and Instrumentation 2024: Ultraviolet to Gamma Ray

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A Review: Laser Interference Lithography for Diffraction Gratings and Their Applications in Encoders and Spectrometers

Luo,

Shan,

2024

Sensors

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The unique diffractive properties of gratings have made them essential in a wide range of applications, including spectral analysis, precision measurement, optical data storage, laser technology, and biomedical imaging. With advancements in micro- and nanotechnologies, the demand for more precise and efficient grating fabrication has increased. This review discusses the latest advancements in grating manufacturing techniques, particularly highlighting laser interference lithography, which excels in sub-beam generation through wavefront and amplitude division. Techniques such as Lloyd’s mirror configurations produce stable interference fringe fields for grating patterning in a single exposure. Orthogonal and non-orthogonal, two-axis Lloyd’s mirror interferometers have advanced the fabrication of two-dimensional gratings and large-area gratings, respectively, while laser interference combined with concave lenses enables the creation of concave gratings. Grating interferometry, utilizing optical interference principles, allows for highly precise measurements of minute displacements at the nanometer to sub-nanometer scale. This review also examines the application of grating interferometry in high-precision, absolute, and multi-degree-of-freedom measurement systems. Progress in grating fabrication has significantly advanced spectrometer technology, with integrated structures such as concave gratings, Fresnel gratings, and grating–microlens arrays driving the miniaturization of spectrometers and expanding their use in compact analytical instruments.

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Transmission grating arrays for the X-ray spectrometer on Arcus Probe

Cited by 2 publications

References 32 publications

Improved efficiency critical-angle transmission gratings for high-resolution soft x-ray spectroscopy

Improved efficiency critical-angle transmission gratings for high-resolution soft x-ray spectroscopy

A Review: Laser Interference Lithography for Diffraction Gratings and Their Applications in Encoders and Spectrometers

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