Metasurfaces, the two-dimensional counterpart of metamaterials, have caught great attention thanks to their powerful control over electromagnetic waves. Recent times have seen the emergence of a variety of metasurfaces exhibiting not only countless functionalities, but also a reconfigurable or even programmable response. Reconfigurability, however, entails the integration of tuning and control circuits within the metasurface structure and, as this new paradigm moves forward, new reliability challenges may arise. This paper examines, for the first time, the reliability problem in programmable metamaterials by proposing an error model and a general methodology for error analysis. To derive the error model, the causes and potential impact of faults are identified and discussed qualitatively. The methodology is presented and instantiated for beam steering, which constitutes a relevant example for programmable metasurfaces. Results show that performance degradation depends on the type of error and its spatial distribution and that, in beam steering, error rates over 10% can still be considered acceptable.