Transparent conducting properties of Ni doped zinc oxide thin films prepared by a facile spray pyrolysis technique using perfume atomizer

Bouaoud, A.; Rmili, A.; Ouachtari, F.; Louardi, A.; Chtouki, T.; Elidrissi, B.; Erguig, H.

doi:10.1016/j.matchemphys.2012.10.023

Cited by 49 publications

(12 citation statements)

References 27 publications

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“…Many researchers have reported a decrease in electrical resistivity of ZnO films by doping with some cationic (Al, Ga, Ta, Ni, B) and anionic (F, N) elements [13][14][15][16][17][18]. Only few reports are available on tantalum doped ZnO thin films.…”

Section: Introductionmentioning

confidence: 99%

Enhancing the electrical parameters of ZnO films deposited using a low-cost chemical spray technique through Ta doping

Ravichandran¹,

Subha²,

Dineshbabu³

et al. 2016

Journal of Alloys and Compounds

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Section: Introductionmentioning

confidence: 99%

Enhancing the electrical parameters of ZnO films deposited using a low-cost chemical spray technique through Ta doping

Ravichandran¹,

Subha²,

Dineshbabu³

et al. 2016

Journal of Alloys and Compounds

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“…Two materials have been proven to exhibit all of the properties required for a good gas sensing performance, namely zinc oxide (ZnO) [ 11 – 14 ] and tin oxide (SnO 2 ) [ 15 – 17 ], while others, such as indium tin oxide (ITO), In 2 O 3 , CdO, ZnSnO 4 , NiO, etc. , have also been widely studied [ 13 ]. However, before true integration of gas sensor components inside gadgets, such as smart phones and wrist watches, can be achieved, several challenges must still be overcome: Until recently, available gas sensors relied on a bulky architecture whose manufacturing was not compatible with that of a conventional CMOS process sequence.…”

Section: Introductionmentioning

confidence: 99%

Performance and Stress Analysis of Metal Oxide Films for CMOS-Integrated Gas Sensors

Filipovic

Selberherr

2015

Sensors

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The integration of gas sensor components into smart phones, tablets and wrist watches will revolutionize the environmental health and safety industry by providing individuals the ability to detect harmful chemicals and pollutants in the environment using always-on hand-held or wearable devices. Metal oxide gas sensors rely on changes in their electrical conductance due to the interaction of the oxide with a surrounding gas. These sensors have been extensively studied in the hopes that they will provide full gas sensing functionality with CMOS integrability. The performance of several metal oxide materials, such as tin oxide (SnO2), zinc oxide (ZnO), indium oxide (In2O3) and indium-tin-oxide (ITO), are studied for the detection of various harmful or toxic cases. Due to the need for these films to be heated to temperatures between 250 °C and 550 °C during operation in order to increase their sensing functionality, a considerable degradation of the film can result. The stress generation during thin film deposition and the thermo-mechanical stress that arises during post-deposition cooling is analyzed through simulations. A tin oxide thin film is deposited using the efficient and economical spray pyrolysis technique, which involves three steps: the atomization of the precursor solution, the transport of the aerosol droplets towards the wafer and the decomposition of the precursor at or near the substrate resulting in film growth. The details of this technique and a simulation methodology are presented. The dependence of the deposition technique on the sensor performance is also discussed.

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“…Doping with transition metals using spray deposition has yielded ZnO films with comparably good optical transmittance and electrical conductivity, although many transition metals are toxic heavy metals [13][14][15][16][17][18]. The best optical and electrical conductivity results are commonly achieved by doping ZnO with elements from the boron group (B, Al, Ga, In) which act as +3 oxidation state electron donors when substituting Zn 2+ [5,19].…”

Section: Introductionmentioning

confidence: 99%

A comparative study on physical properties of Al-doped zinc oxide thin films deposited from zinc acetate and zinc acetylacetonate by spray pyrolysis

Eensalu¹,

Krunks²,

Gromyko³

et al. 2017

energetika

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Herein we present a comparative study on highly transparent, conductive aluminium-doped ZnO (AZO) thin films deposited by pneumatic spray pyrolysis (PSP) of a zinc acetate based solution and a zinc acetylacetonate based solution on soda lime glass. The structural, optical and electrical properties of the films were studied depending on aluminium content in the precursor solution and substrate temperature during deposition (Ts). The solution used to prepare AZO thin films contained 0.2 M zinc acetate or 0.2 M zinc acetylacetonate and aluminium acetylacetonate between 0-15 at.% [Al]/[Zn]. Substrate temperature was varied from 275 to 450 °C. Transmittance and reflectance spectra were recorded by UV-VIS-NIR spectroscopy. Resistivity, mobility and charge carrier density were determined by four point probe measurements in ambient conditions. According to X-ray diffraction analysis, AZO films are highly c-axis oriented until 2-3 at.% [Al]/[Zn] in the spray solution, depending on zinc precursor. Crystallite size is 25-30 nm for AZO films deposited at Ts 400 °C. All AZO films exhibited high average optical transmittance of 76-94% in the visible spectrum 400-800 nm wavelength range. Eg values ranged from 3.32 in undoped ZnO to 3.58 eV in in highly doped AZO films deposited from zinc acetylacetonate due to the formation of secondary AlO x phases. The lowest resistivities were obtained at Ts 400 °C for films deposited from zinc acetate, 3-7.

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Transparent conducting properties of Ni doped zinc oxide thin films prepared by a facile spray pyrolysis technique using perfume atomizer

Cited by 49 publications

References 27 publications

Enhancing the electrical parameters of ZnO films deposited using a low-cost chemical spray technique through Ta doping

Enhancing the electrical parameters of ZnO films deposited using a low-cost chemical spray technique through Ta doping

Performance and Stress Analysis of Metal Oxide Films for CMOS-Integrated Gas Sensors

A comparative study on physical properties of Al-doped zinc oxide thin films deposited from zinc acetate and zinc acetylacetonate by spray pyrolysis

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