The spontaneous formation of ternary AlInN core-shell nanorod arrays with variable In concentration in the core has been realized onto c-plane sapphire substrates by ultra-high-vacuum magnetron sputter epitaxy with Ti 0.21 Zr 0.79 N or VN seed layer assistance. Without the proper seed layer assistance, a continuous Al 1-x In x N film was grown. The nanorods exhibit hexagonal cross sections with preferential growth along the c axis. A core-shell rod structure with a higher In concentration in the core was observed by (scanning) transmission electron microscopy in combination with low-loss electron energy loss spectroscopy and energy dispersive X-ray spectroscopy. 5 K cathodoluminescence spectroscopy of Al 0.86 In 0.14 N nanorods revealed band edge emission at ~5.46 eV, which was accompanied by a strong defect-related emission at ~ 3.38 eV. The group III-nitride, including AlN, GaN, InN, and their alloys, nanomaterials have generated great interest in the past decade because high-performance semiconductor nanodevices are expected to be developed, such as high-sensitivity sensors, highresponsivity photodetectors, and high-brightness light-emitting devices. [1][2][3][4][5][6][7][8][9][10][11][12][13] To enhance the nanodevices' performance, single or multiple heterojunctions grown along the length of a nanorod or in its radial direction (core-shell structure) can be used. [8][9][10][11][12][13] In particular, for making the bottom electrodes on many nonconducting substrates and simplify device fabrication processes. Moreover, a high growth rate of the nanorods implies that a full structure of on-chip nanodevices may be fabricated within a few hours in the same chamber without breaking vacuum, which is an attractive scheme for large-scale production.The sample growth was performed in an ultra-high-vacuum (UHV) magnetron sputter epitaxy (MSE) system. Details of the growth system can be found elsewhere.
17,18)The sapphire substrates were subsequently degreased with trichloroethylene, acetone, and shows lattice-resolved images taken at the rod center and shell at positions marked with A and B in Fig. 3(a), respectively, which reveals a ~ 23 o misorientation between the cplanes in the rod core and shell. The c lattice parameters obtained by averaging 20 lattice 6 constants are 5.09 and 5.00 nm at the core and shell, respectively. By converting the lattice constant to compositions using Vegard's rule,using the c lattice constants of strain-free bulk AlN and InN,19) the InN mole fractions are estimated to be ~ 0.14 and 0.03 at the rod core and shell, respectively, which confirms the core-shell nanorod structure. An elemental profile across the rod, obtained through an EDX nano-probe line scan in the TEM, is shown in Fig. 3(c), along with curves smoothed by averaging neighboring data points. It is clearly seen that the In concentration in the core is higher than that in the shell and vice versa for Al. To further confirm the radial concentration variation in the rods, a low-loss EELS line profile was acquired across the d...