Transverse Interdigitated Electrode Actuation of Homogeneous Bulk PZT

Hareesh, P.; Misri, I.; Yang, Shuang; DeVoe, Don L.

doi:10.1109/jmems.2012.2211575

Cited by 28 publications

(14 citation statements)

References 26 publications

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“…One approach is to use an inactive central layer, such as carbon fiber composite (CF), that bonds the PZT together and provides electrical contact, as in [16]. Other methods include interdigitated electrodes on a single PZT plate [17], which can harness the typically higher d 33 coefficient but the electric field doesn't penetrate through the entire material thickness.…”

Section: Current State-of-the-artmentioning

confidence: 99%

Design and manufacturing rules for maximizing the performance of polycrystalline piezoelectric bending actuators

Jafferis¹,

Smith²,

Wood³

2015

Smart Mater. Struct.

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Increasing the energy and power density of piezoelectric actuators is very important for any weight-sensitive application, and is especially crucial for enabling autonomy in micro/milli-scale robots and devices utilizing this technology. This is achieved by maximizing the mechanical flexural strength and electrical dielectric strength through the use of laser-induced melting or polishing, insulating edge coating, and crack-arresting features, combined with features for rigid ground attachments to maximize force output. Manufacturing techniques have also been developed to enable mass customization, in which sheets of material are pre-stacked to form a laminate from which nearly arbitrary planar actuator designs can be fabricated using only laser cutting. These techniques have led to a 70% increase in energy density and an increase in mean lifetime of at least 15× compared to prior manufacturing methods. In addition, measurements have revealed a doubling of the piezoelectric coefficient when operating at the high fields necessary to achieve maximal energy densities, along with an increase in the Young's modulus at the high compressive strains encountered-these two effects help to explain the higher performance of our actuators as compared to that predicted by linear models.

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Section: Current State-of-the-artmentioning

confidence: 99%

Design and manufacturing rules for maximizing the performance of polycrystalline piezoelectric bending actuators

Jafferis¹,

Smith²,

Wood³

2015

Smart Mater. Struct.

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“…6). It has been previously demonstrated for a bulk PZT cantilever beam that the actuator response increases linearly with applied voltage all the way up to 1.6 V/ µm [8]. Fig.…”

Section: Resultsmentioning

confidence: 87%

“…The stators were poled at an electric field of 4V/µm, temperature of 100 ºC for 30 minutes [8]. The stators were actuated using 5Vp-p DQD signals and reversible traveling wave rotation successfully achieved.…”

Section: Resultsmentioning

confidence: 99%

Traveling wave annular ultrasonic micromotors using bulk PZT

Hareesh

Yang

DeVoe

2012

2012 Microsystems for Measurement and Instrumentation (MAMNA)

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This paper describes the development a novel traveling wave ultrasonic micromotor fabricated directly from low-cost and high-performance bulk piezoceramic PZT. We report a simpler approach to realizing traveling wave ultrasonic micromotors in which traveling waves are generated within a tethered annular stator microfabricated from a single sheet of bulk PZT. Actuation is achieved using interdigitated electrodes deposited on a single layer, enabling monolithic stators to be fabricated in a batch process from a single sheet of high quality bulk piezoceramic. The process requires only 2 photolithography steps, greatly simplifying design and manufacture while improving device performance and microfabrication costs.

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“…The micromotor rotors were fabricated from 100 μ m thick glass coverslips using micropowder blasting and dry film photolithography following our previous work [28][29], as shown in Figure 5. A 20 μ m thick permanent dry film negative resist (DFR 3020, EMS Adhesives) was used to pattern a 1500 μ m diameter post in the center of each glass rotor.…”

Section: Stator and Rotor Fabricationmentioning

confidence: 99%

Miniature Bulk PZT Traveling Wave Ultrasonic Motors for Low-Speed High-Torque Rotary Actuation

Hareesh

DeVoe

2018

J. Microelectromech. Syst.

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Traveling wave ultrasonic micromotors fabricated from a single layer of homogeneous bulk piezoelectric lead zirconate titanate (PZT) are described. The miniature motors are capable of bi-directional rotary motion with controllable speeds. By taking advantage of transverse interdigitated electrodes to excite traveling waves in a patterned bulk PZT substrate, the monolithic micromotor stators are patterned using a simple and low cost fabrication technique based on micropowder blasting. Performance of the ultrasonic micromotors is explored using devices with integrated glass rotors, using defined preload forces applied between the microfabricated stator and rotor elements. For the case of a 4.12 mm diameter PZT stator, a maximum speed of 30 rpm and stall torque of 501 mN · mm are achieved when applying a 323 mN preload force to the rotor.

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Transverse Interdigitated Electrode Actuation of Homogeneous Bulk PZT

Cited by 28 publications

References 26 publications

Design and manufacturing rules for maximizing the performance of polycrystalline piezoelectric bending actuators

Design and manufacturing rules for maximizing the performance of polycrystalline piezoelectric bending actuators

Traveling wave annular ultrasonic micromotors using bulk PZT

Miniature Bulk PZT Traveling Wave Ultrasonic Motors for Low-Speed High-Torque Rotary Actuation

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