Vibration of Continuous Systems 2006
DOI: 10.1002/9780470117866.ch14
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Transverse Vibration of Plates

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Cited by 2 publications
(1 citation statement)
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“…The studied mechanical oscillators are 100 kHz [29] and 1 MHz [30] membranes, which have an area of A = (1mm) 2 and A = (250µm) 2 respectively and can be suspended 300 nm above another capacitive plate [31]. Additionally, we consider 10 MHz, 15µm diameter and 100 nm thick membranes suspended 50 nm above an electrode [32], and hypothetical smaller membranes with a 100 MHz frequency achieved by reducing the area by a factor 10 [33]. Concerning even higher frequency oscillators, note that gigahertz voltage-biased mechanical oscillators have succesfully been resonantly coupled to transmons [34].…”
Section: Mechanicsmentioning
confidence: 99%
“…The studied mechanical oscillators are 100 kHz [29] and 1 MHz [30] membranes, which have an area of A = (1mm) 2 and A = (250µm) 2 respectively and can be suspended 300 nm above another capacitive plate [31]. Additionally, we consider 10 MHz, 15µm diameter and 100 nm thick membranes suspended 50 nm above an electrode [32], and hypothetical smaller membranes with a 100 MHz frequency achieved by reducing the area by a factor 10 [33]. Concerning even higher frequency oscillators, note that gigahertz voltage-biased mechanical oscillators have succesfully been resonantly coupled to transmons [34].…”
Section: Mechanicsmentioning
confidence: 99%