2006
DOI: 10.1007/s10765-006-0115-5
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Transversely Oscillating MEMS Viscometer: The “Spider”

Abstract: The analysis of a new viscometer that takes the form of an oscillating plate, fabricated from silicon using the methods of micro-electro-mechanical-systems (MEMS) is considered. The instrument is designed principally for experimental use in the oil industry. The plate is 1.6 mm wide, 2.4 mm long, and 20µm thick. It is suspended from a 0.4 mm thick support by 48 square cross-section legs, each of length 0.5 mm width and depth of 20µm. The process of lithography is used to deposit layers atop the silicon. These … Show more

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Cited by 17 publications
(18 citation statements)
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“…Resonating cantilevers and plates have been the most frequently used type of MEMS viscometers [16][17][18] which are usually actuated by means of piezoelectric material [19][20][21], magnetic field [22][23][24] or alternating electricity current [25][26][27]. Theoretical studies and models connect variations in fluid density and viscosity to the shift in resonant frequency and quality factor, respectively [28][29][30].…”
Section: Vibrating Microcantilevermentioning
confidence: 99%
See 1 more Smart Citation
“…Resonating cantilevers and plates have been the most frequently used type of MEMS viscometers [16][17][18] which are usually actuated by means of piezoelectric material [19][20][21], magnetic field [22][23][24] or alternating electricity current [25][26][27]. Theoretical studies and models connect variations in fluid density and viscosity to the shift in resonant frequency and quality factor, respectively [28][29][30].…”
Section: Vibrating Microcantilevermentioning
confidence: 99%
“…One example, used for viscometric study of blood, was the integration of two electrodes in a microchannel and monitoring of the changes in fluid impedance [31]. Considering the non-Newtonian effect of fluids, some MEMS-based microplate oscillating systems have been designed and the governing equations were derived [26] as Equation (3),…”
Section: Vibrating Microcantilevermentioning
confidence: 99%
“…One typical parameter detected by sensors is the viscosity. (Agoston et al, 2004;Agoston et al, 2005b;Ronaldson et al, 2006) Here, it has to be pointed out that each sensor principle measures a different aspect of the viscosity. Electrical parameters of the oil such as permittivity or conductivity (Agoston et al, 2004;Basu et al, 2000;Gegner et al, 2010) are easy to measure and can be realized in robust devices.…”
Section: Sensors For Online Oil Condition Monitoringmentioning
confidence: 99%
“…At the point when an endothermic response happens [11], the Heat required is retained from the warm vitality of the arrangement [12], which diminishes its temperature. The temperature change, alongside the particular Heat and mass of the arrangement [13], would then be able to be utilized to figure the measure of Heat included [14].…”
Section: Introductionmentioning
confidence: 99%