“…[7][8][9] Therefore, the quick designing of BV and R on,sp , which is dependent not only on drift region doping concentration, but also on interface charge, becomes a complex work to facilitate the optimization. [10][11][12][13] Owing to material-dependent HK pillar, BV 2 /R on,sp regarded as the figure of merit gives a useful insight into the assessment of compromising BV-R on,sp . [14,15] Although BV varies in a range of −8.1%-5.3% with unintentional penalty in R on,sp increment affected by HK pillar, [16,17] in the case of HKMOS with interface charge, the BV-R on,sp trade-off becomes difficult to account for.…”