Trapezoidal SiNWs array fabricated by AFM-LAO for Dengue virus DNA oligomer detection

Yusoh, Siti Noorhaniah; Yaacob, Khatijah Aisha; Alias, Nurain Najihah

doi:10.1088/2053-1591/ab3571

Cited by 4 publications

(2 citation statements)

References 32 publications

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“…The patterns were etched using TMAH 25 wt.% with different additions of IPA concentrations: 10, 20, and 30 vol.% at 65 °C for 30 s. The fabricated SiNW devices were characterized under AFM contact mode topography and the results shown in Figure 1 b–d were obtained with respect to the etching parameters. All SiNWs produced have a trapezoidal shape [ 8 ]. The width and height of the SiNWs were measured directly with the AFM software.…”

Section: Resultsmentioning

confidence: 99%

“…Silicon nanowires can be fabricated by using two approaches—bottom-up or top-down—with controllable compositions, morphologies, structures, and dimensions [ 1 , 4 , 5 ]. Nanotechnology has discovered that SiNWs have great potential in being used as biosensor transducers for biomolecule detection, e.g., enzymes, antibodies, antigens, RNA, and DNA [ 6 , 7 , 8 ]. The SiNWs are widely used in biosensor research, since they are highly sensitive devices [ 9 , 10 , 11 ].…”

Section: Introductionmentioning

confidence: 99%

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Study on the Physical Properties of a SiNW Biosensor to the Sensitivity of DNA Detection

Yusoh

Yaacob

2021

Materials

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SiNW (silicon nanowire) arrays consisting of 5- and 10-wires were fabricated by using an atomic force microscope—the local anodic oxidation (AFM-LAO) technique followed by wet chemical etching. Tetramethylammonium hydroxide (TMAH) and isopropyl alcohol (IPA) at various concentrations were used to etch SiNWs. The SiNWs produced were differed in dimension and surface roughness. The SiNWs were functionalized and used for the detection of deoxyribonucleic acid (DNA) dengue (DEN-1). SiNW-based biosensors show sensitive detection of dengue DNA due to certain factors. The physical properties of SiNWs, such as the number of wires, the dimensions of wires, and surface roughness, were found to influence the sensitivity of the biosensor device. The SiNW biosensor device with 10 wires, a larger surface-to-volume ratio, and a rough surface is the most sensitive device, with a 1.93 fM limit of detection (LOD).

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Section: Resultsmentioning

confidence: 99%