1998
DOI: 10.1351/pac199870061151
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Treatment of dust particles in an RF plasma monitored by Mie scattering rotating compensator ellipsometry

Abstract: Abstract

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Cited by 13 publications
(11 citation statements)
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“…31 Our ray optics theoretical calculation, described in Appendix B, yields qϭ0.97, assuming n 2 ϭ1.68. 26,36 This value is within the range of uncertainty for our measurement.…”
Section: Determination Of Qsupporting
confidence: 70%
“…31 Our ray optics theoretical calculation, described in Appendix B, yields qϭ0.97, assuming n 2 ϭ1.68. 26,36 This value is within the range of uncertainty for our measurement.…”
Section: Determination Of Qsupporting
confidence: 70%
“…A comparable technique termed "Mie scattering ellipsometry" (MSE) is used in plasma physics [101,102]. Main focus in MSE applications has been the determination of particle size and size distribution for particles created in plasmas [103][104][105], e.g. for process control in dust sensitive micro device fabrication.…”
Section: Ellipsometric Light Scatteringmentioning
confidence: 99%
“…In experiments requiring long‐term confinement of particles, these have led to oxidation effects changing the particle properties, such as size, surface morphology, and probably also composition or surface passivation over time. [ 15–18 ]…”
Section: Introductionmentioning
confidence: 99%