1990
DOI: 10.1016/0167-9317(90)90010-q
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Trends in VLSI technologies

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Cited by 3 publications
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“…Microfluidics originated in the 1980s, a concept that stemmed from the development of a fully automatic analytical measuring station on the factory floor with the aim of miniaturizing large equipment. 17,18 The rise of this technology is related to the development of lithography on silicon and integrated circuit technology. 18 In 1990, ''Microchemical Full Analysis System'' from Swiss scientist Andreas Manz clarified the concept of micro and full, marking the opening of the era of microfluidic.…”
Section: Microfluidics For Detection Of Cvd Markersmentioning
confidence: 99%
See 1 more Smart Citation
“…Microfluidics originated in the 1980s, a concept that stemmed from the development of a fully automatic analytical measuring station on the factory floor with the aim of miniaturizing large equipment. 17,18 The rise of this technology is related to the development of lithography on silicon and integrated circuit technology. 18 In 1990, ''Microchemical Full Analysis System'' from Swiss scientist Andreas Manz clarified the concept of micro and full, marking the opening of the era of microfluidic.…”
Section: Microfluidics For Detection Of Cvd Markersmentioning
confidence: 99%
“…17,18 The rise of this technology is related to the development of lithography on silicon and integrated circuit technology. 18 In 1990, ''Microchemical Full Analysis System'' from Swiss scientist Andreas Manz clarified the concept of micro and full, marking the opening of the era of microfluidic. 19 With the development of materials science, the emergence of polydimethylsiloxane (PDMS) revolutionized microfluidic devices and brought microfluidics into a booming era.…”
Section: Microfluidics For Detection Of Cvd Markersmentioning
confidence: 99%