Trial fabrication of micron sized arm using reversible TiNi alloy thin film actuators

Kuribayashi, Katsutoshi; Shimizu, Seiji; Nishinohara, Takuma; Taniguchi, Takao; Masuda, Yoshitake; Ogawa, S.

doi:10.1109/iros.1993.583865

Cited by 13 publications

(5 citation statements)

References 2 publications

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“…Moreover, the simplicity of their actuation principle and their compatibility with microsystem technologies make them very attractive for highly miniaturized and micro-electromechanical systems. Consequently, many SMA micro-actuator applications have been tested recently more particularly to built innovative biomedical instruments like endoscopes, steerable catheters, forceps, grippers, prosthetic devices [4][5][6][7].…”

Section: Introductionmentioning

confidence: 99%

Optimal design of micro-actuators based on SMA wires

Troisfontaine

Bidaud

Larnicol

1999

Smart Mater. Struct.

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This paper proposes a design-oriented thermomechanical model of SMA wires. This model describes at a macroscopic scale the deformation of SMA wires in function of parameters governing the phase transformation (temperature and stress). This model is experimentaly validated on one of the most popular manufactured products: Flexinol wires. An optimal design process for SMA-wire based micro-actuators is described and illustrated through a basic structure.

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Section: Introductionmentioning

confidence: 99%

Optimal design of micro-actuators based on SMA wires

Troisfontaine

Bidaud

Larnicol

1999

Smart Mater. Struct.

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“…Several methods to do this have been described using wet [5], [9]- [11], [28], [29] or dry [30] etching. In this paper, a simple method is proposed that uses a dicing machine [see Fig.…”

Section: Fabricationmentioning

confidence: 99%

A three-dimensional shape memory alloy microelectrode with clipping structure for insect neural recording

Takeuchi¹,

Shimoyama

2000

J. Microelectromech. Syst.

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A microelectrode, with clipping structure for neural recording from a free-moving insect, was designed and fabricated using a shape memory alloy (SMA) thin film. The SMA thin films (titanium nickel; Ti-48at.%Ni) are deposited by RF magnetron sputtering and patterned by HF-HNO 3 wet etching. The transformation temperatures of the SMA thin films were measured at 54 C (A*) and 50 C (M*). The SMA microelectrode consists of a°"hook" structure (720 m 480 m) and two "C"-shape probes (600 m 70 m). The electrode impedance is about 5 k at 1 kHz. The desired three-dimensional (3-D) shape is given to the electrode by a bonded wire. The clinging force of the electrode to the nerve is enhanced by the 3-D structures. The SMA microelectrode can clip a nerve cord tightly. The damages of the nerve by thermal actuation of the clip are not observed by physiological analysis. The neural activity from a living insect was successfully recorded with this SMA microelectrode. [423]Index Terms-Microelectrode, neural recording, SMA thin film.

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“…However, new research and development results indicate that the breakthrough can be expected soon [Kohl94], [Kuri93]. Typically, an SMA actuator can be used as a joint of a miniaturized robot arm, or as an end effector of a biomedical instrument, like a catheter or an endoscope.…”

Section: Motion Principle and Its Propertiesmentioning

confidence: 99%

“…One of the first experiments in which a flexible NiTi microarm was mounted on a silicon wafer was described in [Kuri93). They can, for example, be applied in robot grippers.…”

Section: Micro Grippersmentioning

confidence: 99%