Triaxial Fast Tool Servo Using Hybrid Electromagnetic–Piezoelectric Actuation for Diamond Turning

Zhu, Zihui; Chen, Li; Niu, Yuhan; Pu, Xiaonan; Huang, Peng; To, Suet; Zhu, Limin; Zhu, Zhiwei

doi:10.1109/tie.2021.3060635

Cited by 28 publications

(4 citation statements)

References 33 publications

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“…As shown in Figure 7a, via a four-axis ultra-precision lathe (Moore Nanotech 350FG, USA) with self-designed tri-axial FTS [30], one machining experiment was performed to verify the validity of the proposed method. The loopshaping tuned PID controller with a feedforward compensator and a damping controller are employed in FTS to improve the trajectory tracking accuracy.…”

Section: Experiments Results and Discussionmentioning

confidence: 99%

Dual-Axial Tool Servo Diamond Turning of Hierarchical Micro-Nano-Structured Surfaces

Zhu

Chen

et al. 2021

JMMP

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This paper reports on a dual-axial tool servo diamond turning method for the one-step fabrication of hierarchical micro-nano-structured surfaces. With respect to the dual-axial servo motion (XZ), the z-axis motion can generate the primary surface with a complex shape, and the x-axis motion is used to synchronously form the secondary structure via controlling the residual tool marks. The toolpath determination algorithm for the developed turning method is described in detail, and the effect of the machining parameters on the basic feature and sizes of the generated secondary structures is investigated through conducting the numerical simulation for both toolpath and surface generation. The simulation result indicates that the additional x-axial motion is effective for the deterministic generation of a variety of secondary structures. Finally, taking advantage of an ultra-precision lathe with a self-developed tri-axial FTS, a hierarchical surface with high accuracy is practically generated.

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Section: Experiments Results and Discussionmentioning

confidence: 99%

Dual-Axial Tool Servo Diamond Turning of Hierarchical Micro-Nano-Structured Surfaces

Zhu

Chen

et al. 2021

JMMP

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“…Zhu, Z.H. et al [ 17 ] reported high-performance triaxial FTS with hybrid electromagnetic–piezoelectric actuation and a hybrid parallel–serial-kinematic structure. To generate the planar motion as well as to carry the piezoactuated vertical motion, a novel axis-symmetric linearized reluctance actuator (AS-LRA) was proposed.…”

Section: Introductionmentioning

confidence: 99%

Modeling of Rapid Response Characteristics of Piezoelectric Actuators for Ultra-Precision Machining

et al. 2023

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Piezoelectric actuators are characterized by high positioning accuracy, high stiffness and a fast response and are widely used in ultra-precision machining technologies such as fast tool servo technology and ultrasonic machining. The rapid response characteristics of piezoelectric actuators often determine the overall quality of machining. However, there has been little research on the fast response characteristics of piezoelectric actuators, and this knowledge gap will lead to low precision and poor quality of the final machining. The fast response characteristics of a piezoelectric actuator were studied in this work. Firstly, the piezoelectric actuator was divided into a no-load state and a load state according to the working state. A fast response analysis and output characteristic analysis were carried out, the corresponding dynamic model was established, and then the model was simulated. Finally, an experimental system was established to verify the dynamic model of the piezoelectric actuator’s fast response by conducting an experiment in which the piezoelectric actuator bounces a steel ball. The experimental results verify the correctness of the model and show that the greater the cross-sectional area and height of the piezoelectric actuator, the higher the bouncing height of the ball, and the better the dynamic performance of the piezoelectric actuator. It is believed that this study has guiding significance for the application of the dynamic characteristics of piezoelectric actuators in the machining field.

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“…FTS uses a high bandwidth actuator to drive the diamond tool to generate linear reciprocating fast servo motion, and combines spindle rotation motion and tool feed motion to cut the optical free-form surface [10]. Several actuators commonly used in FTS include piezoelectric actuator [11], Lorentz force actuator [12] and Maxwell electromagnetic actuator [13]. Piezoelectric actuator has the superiorities of high precision, high stiffness, large output force, and is relatively more widely used in FTS [14].…”

Section: Introductionmentioning

confidence: 99%

Study of the surface roughness and optimization of machining parameters during laser-assisted fast tool servo machining of glass-ceramic

Fan

Zhou

Chen

et al. 2023

Surf. Topogr.: Metrol. Prop.

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Glass-ceramic is a typical hard and brittle material that is difficult to machine. In order to improve the surface quality of laser-assisted fast tool servo machining optical free-form surface of glass-ceramic, the effects of spindle speed, feed speed, piezoelectric frequency and laser power on the surface roughness were investigated. Firstly, the Taguchi method (TM) was used to establish the orthogonal experiment, and the contribution rate of each machining parameter to the surface roughness was obtained through variance and signal-to-noise ratio (S/N) analysis. The order of the influence degree of each parameter on the surface roughness is as follows: laser power> spindle speed> feed speed> piezoelectric frequency. The optimal machining parameter combinations obtained for the TM experiment are as follows: spindle speed 50rpm, feed speed 0.01mm/rev, piezoelectric frequency 8Hz, laser power 75W. The range of surface roughness reduction obtained by comparing laser-assisted machining (LAM) with pure fast tool servo (FTS) machining is 38.75%~58.77%. The Box-Behnken Design (BBD) in response surface methodology (RSM) was used to design experiments and a regression model for surface roughness was established through RSM. The deviation between the surface roughness predicted by the regression equation and the experimental value is less than ± 6%. The influence law of various machining parameters on surface roughness was studied through three-dimensional response surface. RSM optimized the minimum surface roughness with a desirability of 99.43%. The optimal combination of machining parameters optimized through RSM is as follows: spindle speed 53.71rpm, feed speed 0.02mm/rev, piezoelectric frequency 6.73Hz, laser power 72W. This paper is the first to combine LAM with FTS for machining optical free-form surface of glass-ceramic. This study provides a reference for laser-assisted fast tool servo machining and the research methods of surface quality.

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Triaxial Fast Tool Servo Using Hybrid Electromagnetic–Piezoelectric Actuation for Diamond Turning

Cited by 28 publications

References 33 publications

Dual-Axial Tool Servo Diamond Turning of Hierarchical Micro-Nano-Structured Surfaces

Dual-Axial Tool Servo Diamond Turning of Hierarchical Micro-Nano-Structured Surfaces

Modeling of Rapid Response Characteristics of Piezoelectric Actuators for Ultra-Precision Machining

Study of the surface roughness and optimization of machining parameters during laser-assisted fast tool servo machining of glass-ceramic

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