Tribological behavior of unlubricated sliding between a steel ball and Si-DLC deposited by ultra-high-speed coating employing an MVP method

Effect of humidity on the friction properties of a-C:H and a-C:H:Si films deposited by PECVD employing microwave sheath-voltage combination plasma

“…11) On the other hand, as for TMS/C 2 H 2 flow ratio, the deposition rate is expected to increase with increasing TMS/C 2 H 2 flow ratio. 9) Considering the deposition rate during plasma-on, which decreased with increasing duty ratio, the effect of substrate temperature was more dominant than that of the TMS low rate. Note that the highest deposition rate obtained by the duty ratio of 30% is ascribed to the effect of TMS/C 2 H 2 flow ratio.…”

“…A steel plate (SKH51, JIS) was used as a substrate. a-C:H:Si films were deposited by PECVD with MVP from Ar, C 2 H 2 , and trimethylsilane (TMS) gases, 9,10) where the Si content was controlled to be about 5% by changing the flow rate ratio between C 2 H 2 and TMS. A duty ratio of microwave pulse synchronized with a DC pulse voltage was varied from 10 to 50%.…”

Effect of Temperature on Anti-Corrosive Properties of Diamond-Like Carbon Coating on S355 Steel

“…On the other hand, doping nitrogen into DLC gives rise to the transformation of sp 2 to sp 3 carbon hybridization [18]. Furthermore, for non-metallic elements, incorporation of silicon to the DLC coating decreases internal stress and improves tribological behaviour [19]. However, an amorphous hydrogenated carbon (a-C:H) DLC film offer an excellent corrosion protection for the substrates, which are chemically inert to the environment.…”

Continuously Growing Ultrathick CrN Coating to Achieve High Load-Bearing Capacity and Good Tribological Property

“…The coatings, which are fabricated by physical vapor deposition (PVD) technology, such as chromium nitride (CrN), titanium nitride (TiN), zirconium nitride (ZrN), vanadium nitride (VN), diamond-like carbon (DLC), graphitelike carbon (GLC), and various composites based on the above-mentioned compounds (CrAlN, CrSiN, CrCN, CrAlSiN, TiAlN, TiSiN, TiCN, TiAlSiN, CrTiAlN, ZrCN, VAlN, Ti-DLC, Si-DLC, WC–DLC, Cr-GLC, etc.) with good properties like high wear resistance, corrosion protection, and low friction coefficient under variety of conditions, have become more and more popular in the field of material protection, such as drills, gears, bearings, molds, medical implants, seals, and instruments. − Nowadays, the thickness of the coatings is an important parameter having drawn considerable interest in these applications. − For the traditional thin coatings, low load-bearing capacity, low lifetime, and damages that quickly reach down to the substrate have restricted the development of PVD coatings in more and more severe mechanical application conditions, such as high working temperatures, high humidity, high salt spray, and high work load carrying. − However, most PVD coatings generally are limited by small thickness because of the mismatch in the chemical bonding between the coating and substrate, high interfacial free energy, ion-peening mechanism, and the disbanding problem. − Thus, the design and development of thicker PVD protective coatings are most desired and important in fundamental research and industrial applications. In recent years, many researchers have fabricated the wide variety of PVD coatings with high thickness based on the two design concepts of doping C, Si, W, Cr, Al, and other elements and fabricating multilayer coatings. ,, For example, the thick silicon multilayer (20 μm) with alternate compressive/tensile stress layer pairs was designed and deposited by Yang et al Lin et al also have deposited the thick-layered nanocomposite Ti–Si–C–N coatings .…”