The main parameters of samples irradiation on the linear helium ions accelerator are presented as well as of TiO2 irradiated characteristics. It is experimentally shown that with irradiation dose increasing, helium ion energy of 0.12 MeV, the volume electrical resistance and surface electrical resistances on the front and back sides of samples
decrease, the loss angle tangents and relative dielectric permittivities increase. The primary processes, namely: the sputtering, ionization, phonons and vacancies formation, segregation, damage have been calculated. The analysis of experimental and calculated data has shown that a model based on processes of the excitation and propagation of
elastic waves in a concept of the long-range effect most physically correctly describes the changes in electrophysical characteristics of the irradiated samples.