2014
DOI: 10.1016/j.surfcoat.2014.06.019
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Tribological properties of CrZr–Si–N films synthesized using Cr–Zr–Si segment targets

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Cited by 8 publications
(5 citation statements)
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“…The TaNdominant Ta54N46, Ta40W15N45 and Ta36W24N40 films exhibited distinct morphologies after the wear test. The Ta54N46/Ta/SUS420 sample exhibited adhesive wear because of the chemical reaction on the contact area between the counterpart ball and films [59,66]. The wear debris attached to the films.…”
Section: Mechanical Propertiesmentioning
confidence: 99%
“…The TaNdominant Ta54N46, Ta40W15N45 and Ta36W24N40 films exhibited distinct morphologies after the wear test. The Ta54N46/Ta/SUS420 sample exhibited adhesive wear because of the chemical reaction on the contact area between the counterpart ball and films [59,66]. The wear debris attached to the films.…”
Section: Mechanical Propertiesmentioning
confidence: 99%
“…Reactive magnetron cosputtering [17, 24, 28, 32, 33, 35, 44, 46, 48, 49, 51-55, 57, 59, 63] ZrSiN Unfiltered cathodic arc evaporation [21,23] CrAlSiN Cathodic arc evaporation [66] TiSiN Chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/ FBR-CVD) [70] TiSiN A combination of DC and RF magnetron sputtering [41,64] TiSiN Vacuum cathodic arc evaporation [58] zAlSiN DC magnetron sputtering [19,47,71] WSiN DC reactive unbalanced magnetron sputtering [49,72] TiAlSiCuN DC reactive magnetron sputtering [65] ZrTiCrNbSiN Vacuum arc evaporation [31] CrZrSiN Unbalanced magnetron sputtering [37] TiSiN-Ag Reactive magnetron cosputtering [25] TaSiN and CrTaSiN Reactive magnetron cosputtering [36,50] AlTiSiN and CrSiN Cathode arc ion plating system [34,73] TiSiCN Conventional magnetron sputtering and plasma enhanced magnetron sputtering (PEMS) [38,74] ZrSiN Hybrid cathodic arc and chemical vapor process [56] TiAlVSiN Vacuum cathodic arc evaporation [58] NbSiN Unbalanced magnetron sputtering [71] CrSiN Closed field unbalanced magnetron sputtering [75] the MeN crystals or an increase of the thickness of SiN x amorphous phases [48,76]. This process is obtained with high temperature (>550°C) deposition and high nitrogen pressure [64].…”
Section: Zrsinmentioning
confidence: 99%
“…In our previous study, CrAlN monolithic layer coatings showed great mechanical properties such as high hardness (35 GPa) and high adhesion (46 N for SKD61 steel), but the coatings also showed relatively poor wear resistance and thermal stability [4]. In addition, other monolithic layers such as CrZrN and CrZrSiN coatings with a low friction coefficient of approximately 0.25 and excellent thermal stability up to 800 • C have been reported [13][14][15][16][17]. To deposit a CrAlN coating on a very hard WC (≈20 GPa) substrate without delamination, the use of an interlayer of these Cr-based nitride compounds could be advantageous for adhesive strength by reducing the gap of hardness and Young's modulus between the CrAlN coating and the WC substrate.…”
Section: Introductionmentioning
confidence: 98%