Trimming of Silicon Nitride Hard Mask Using Cyclic Deposition and Etch Process

Xu, Li-Tian; Mei, Pei; Yao, Xing-Jun; Chen, Chen; Zhang, Jia-Yun; Zhang, Alan; Wu, Xiao-Peng; Han, Wu-Hao; Lin, Hong-Bo; Zhang, Nichole

doi:10.1109/cstic58779.2023.10219160

2023 China Semiconductor Technology International Conference (CSTIC) 2023

DOI: 10.1109/cstic58779.2023.10219160

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Trimming of Silicon Nitride Hard Mask Using Cyclic Deposition and Etch Process

Li-Tian Xu,

Pei Mei,

Xing-Jun Yao

et al.

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Trimming of Silicon Nitride Hard Mask Using Cyclic Deposition and Etch Process

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