Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics

Liu, X.; Li, Q.; Sikora, A.; Sentís, M.; Utéza, O.; Stoian, Razvan; Zhao, Wei; Cheng, Guanghua; Sanner, N.

doi:10.1364/oe.27.006996

Cited by 18 publications

(11 citation statements)

References 33 publications

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“…Typically, these embedded holes have taper-free profiles, hundreds of nanometers in diameter and a few hundreds of micrometers in-depth, as reported for example in fused silica and sapphire [ 10 , 16 ]. Notwithstanding the effectiveness of short pulse duration Gaussian-Bessel beams for drilling high aspect ratio channels, it is also possible to precisely manipulate the characteristics of the fabricated holes and to access diverse aspect ratios by regulating the beam parameters [ 17 , 18 , 19 ] or by phase engineering [ 20 , 21 ]. As a prerequisite for optimizing the structure and the fabrication process, the configuration of the nanohole should be obtained quickly and precisely.…”

Section: Introductionmentioning

confidence: 99%

Reconstructing of Embedded High-Aspect-Ratio Nano-Voids Generated by Ultrafast Laser Bessel Beams

et al. 2020

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Ultrafast non-diffractive Bessel laser beams provide strong light confinement and show robust advantages for fabricating high-aspect-ratio nanoscale structures inside transparent materials. They take the form of nanoscale voids with typical diameters well below the wavelength and aspect ratio of more than 1000. Delivering 3D morphologies of such nanoscale voids is an important issue to evaluate the result for fabrication. However, the characterization of such laser-induced structures is a difficult task. Here, an accurate and time-saving tomography-like methodology is proposed and adopted for reconstructing the morphology of high-aspect-ratio nano-holes. The technique allows an accurate assertion of laser parameters and position on nano-structured features. The reconstructed configuration reveals that nanoholes morphologies have a close relationship with energy distribution in the focal region. It suggests that the configuration of micro-explosion can be controlled by laser energy deposition in the process of laser-matter interaction down to the nanoscale.

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Section: Introductionmentioning

confidence: 99%

Reconstructing of Embedded High-Aspect-Ratio Nano-Voids Generated by Ultrafast Laser Bessel Beams

et al. 2020

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“…Figure 5 a–c lists AFM images of the ASS on ZnS with average depth of 0.5 μm. It demonstrates that the Bessel beam has experienced undesired nonlinear effects before it converges on the axis, including Kerr self-focusing, multiphoton ionization, avalanche ionization, plasma volume shielding, defocusing, etc., which affect the normal transmission of the beam [ 31 ]. In addition, the surface of ASS measured by AFM is relatively smooth with surface roughness of 16.5 nm and 26.3 nm in a square region of 20 × 20 μm.…”

Section: Resultsmentioning

confidence: 99%

“…Figure 7 demonstrates the reflectivity of the ASS with period of 3 μm and 2.6 μm reduced by 5.9 % and 6.8%, respectively. The surface microstructure depressed the infrared reflectance of the ZnS surface visibly; some energy was converted into the intensity of infrared transmitted light, the other part was absorbed, which included the resonance absorption by the nanoripple, the multiple scattering and absorption by nanoparticles [ 31 ]. The result shows that laser-induced periodic nanostructures can effectively improve the absorption of light and reduce the reflectivity of the material.…”

Section: Resultsmentioning

confidence: 99%

Fabrication of an Anti-Reflective Microstructure on ZnS by Femtosecond Laser Bessel Beams

Liu

et al. 2021

Molecules

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As an important mid-infrared to far-infrared optical window, ZnS is extremely important to improve spectral transmission performance, especially in the military field. However, on account of the Fresnel reflection at the interface between the air and the high-strength substrate, surface optical loss occurs in the ZnS optical window. In this study, the concave antireflective sub-wavelength structures (ASS) on ZnS have been experimentally investigated to obtain high transmittance in the far-infrared spectral range from 6 μm to 10 μm. We proposed a simple method to fabricate microhole array ASS by femtosecond Bessel beam, which further increased the depth of the microholes and suppressed the thermal effects effectively, including the crack and recast layer of the microhole. The influence of different Gaussian and Bessel beam parameters on the microhole morphology were explored, and three ASS structures with different periods were prepared by the optimized Bessel parameters. Ultimately, the average transmittance of the sample with the ASS microhole array period of 2.6 μm increased by 4.1% in the 6 μm to 10 μm waveband, and the transmittance was increased by 5.7% at wavelength of 7.2 μm.

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“…Being able to penetrate materials and reform in drilled channels, they may ensure a maximum efficiency in throughdrilling of materials, including non-transparent ones [66,67]. For drilling applications requiring specific forms, the aspect ratio can be tailored using phase/amplitude corrections and core-ring contrast can be adjusted on the expense of the non-diffractive length [50,68].…”

Section: Technological Applications Of Non-diffractive Ultrafast Bessmentioning

confidence: 99%

High-resolution material structuring using ultrafast laser non-diffractive beams

Stoian

Bhuyan

Rudenko

et al. 2019

Advances in Physics: X

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Scales in the 100 nm range represent a generic cornerstone for laser material processing, enabling novel size-dependent functions on surfaces and in the bulk and thus a new range of technological applications. On these scales, the processed material acquires optical, transport or contact properties that do not only rely on local effects on singular topographic features but involve increasingly collective behaviors. Rapid access to sub-100 nm features with intense coherent light represents nevertheless a challenge in laser structuring in view of the optical diffraction limit. Ultrafast non-diffractive beams with controllable time envelopes can overcome this limit and achieve super-resolved processing, a prerequisite for the next generation of flexible and precise material processing tools. They show a remarkable capacity of structuring transparent materials with high degree of accuracy and exceptional aspect ratio. This capacity relies on triggering fast hydrodynamic and material fracture effects with characteristic spatial scales in the nm range. Reviewing the present achievements and technical potential, we discuss from a dynamic viewpoint the physical mechanisms enabling structural features beyond diffraction limit achieved using ultrafast Bessel beams and indicate applications of high technical relevance. ARTICLE HISTORY

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Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics

Cited by 18 publications

References 33 publications

Reconstructing of Embedded High-Aspect-Ratio Nano-Voids Generated by Ultrafast Laser Bessel Beams

Reconstructing of Embedded High-Aspect-Ratio Nano-Voids Generated by Ultrafast Laser Bessel Beams

Fabrication of an Anti-Reflective Microstructure on ZnS by Femtosecond Laser Bessel Beams

High-resolution material structuring using ultrafast laser non-diffractive beams

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