2021
DOI: 10.1109/access.2021.3109420
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Tunable 24-GHz Antenna Arrays Based on Nanocrystalline Graphite

Abstract: In this work, we present a tunable 24-GHz antenna array based on a CMOS-compatible 110nm-thick nanocrystalline graphite film grown by plasma enhanced chemical vapor deposition. The film has a nominal bulk conductivity exceeding 16000 S/m (hence, greater than any graphene monolayer or industrially available graphene multilayer) but still able to show an outstanding modulation of its charge carrier density in the upper microwave spectrum. The manufactured layer was used to design, simulate, fabricate, and test a… Show more

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Cited by 7 publications
(7 citation statements)
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“…The deposition technique offers the advantage of growing the films directly on an insulating layer (i.e., SiO ), thus eliminating the need for an ulterior transfer step, which, for example, is required for the SLG thin films. The bulk-NCG thin films are grown with a previously established process [ 37 , 38 , 39 ], in a CH :H (60:75 sccm) atmosphere, at a pressure of 200 Pa and an RF discharge power of 100 W. The substrate temperature is kept at a high value of 890–900 °C, over a two h plasma growth step, to promote a high nucleation density. This in turn will result in thin films with high edge defect density, which is beneficial for sensors that rely on conductivity variations due to particle surface adsorption [ 37 ].…”
Section: Materials and Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The deposition technique offers the advantage of growing the films directly on an insulating layer (i.e., SiO ), thus eliminating the need for an ulterior transfer step, which, for example, is required for the SLG thin films. The bulk-NCG thin films are grown with a previously established process [ 37 , 38 , 39 ], in a CH :H (60:75 sccm) atmosphere, at a pressure of 200 Pa and an RF discharge power of 100 W. The substrate temperature is kept at a high value of 890–900 °C, over a two h plasma growth step, to promote a high nucleation density. This in turn will result in thin films with high edge defect density, which is beneficial for sensors that rely on conductivity variations due to particle surface adsorption [ 37 ].…”
Section: Materials and Methodsmentioning
confidence: 99%
“…This in turn will result in thin films with high edge defect density, which is beneficial for sensors that rely on conductivity variations due to particle surface adsorption [ 37 ]. The PECVD process yields bulk-NCG thin films of ≊360–380 nm thickness with a conductivity of over S m [ 38 , 39 ]. For the GNW thin films, the discharge power is increased to 300 W and the process pressure is lowered to 40 Pa to stimulate the growth-induced vertical morphology.…”
Section: Materials and Methodsmentioning
confidence: 99%
“…In this field, CMOS-based devices [ 22 , 23 , 24 , 25 , 26 , 27 ] are also widely employed because of their high level of integration, mass production cost, and combination of RF devices, digital and analogue circuits. However, devices in this technology still consume a lot of power for millimetre-wave band applications.…”
Section: Introductionmentioning
confidence: 99%
“…Another notable process parameter that may not seem highly impactful at first is the plasma growth time, with which the film thickness can be controlled. Although film thickness is the direct consequence of varying the exposure time to the plasma phase, other intrinsic properties also suffer significant changes (e.g., electrical conductivity [6,11]).…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, it is arguably the easiest one to modify and is readily available to do so on any deposition system. Although studies that include time-dependent deposition properties have been presented in the past, they usually focus more deeply on other process parameters, and the scope of said papers is not solely aimed at the investigation of growth time dependence [6,7,11]. For example, Schmidt et al [7] presented a comprehensive study of NCG thin films' properties with respect to several growth parameters, including deposition time, but the paper concentrates on a larger array of parameters and analyses a growth period of only 15 min.…”
Section: Introductionmentioning
confidence: 99%