In this research work, two polydimethylsiloxane diffractive elements (DEs) of 3 mm thickness under the same conditions are fabricated using molding technique and one DEs rough surface is modified by plasma O 2 treatment in a vacuum chamber. The effects of both rough surface DEs on the structure and optical properties are investigated by atomic force microscope, white light interferometer and FDTD simulated, which indicates that the plasma O 2 treatment induces the formation of nanostructures and decreases the surface roughness up to some roughness level. The optical transmittance, reflectance, absorption, Raman scattering spectra and optical coefficient measurement provides better results to polymer DEs, to be used as replica, efficient and cost effective. Furthermore, the stretchable technology is applied on both DEs, which provides results towards diffraction grating and thus, have widespread applications in optical transmission and reflection domain such as measuring, imaging, coding and solar energy.