1980
DOI: 10.1117/12.7972642
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Tunable Diode Laser Spectroscopy: An Invited Review

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Cited by 91 publications
(23 citation statements)
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“…Tunable diode laser (TDL) absorption spectroscopy utilizes the highly specific mid-infrared (IR) absorption characteristics of trace gas molecules to measure the concentration of a desired species in a sample (Eng et al, 1980). TDLs emit monochromatic radiation that may be tuned at a high frequency and resolution.…”
Section: Introductionmentioning
confidence: 99%
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“…Tunable diode laser (TDL) absorption spectroscopy utilizes the highly specific mid-infrared (IR) absorption characteristics of trace gas molecules to measure the concentration of a desired species in a sample (Eng et al, 1980). TDLs emit monochromatic radiation that may be tuned at a high frequency and resolution.…”
Section: Introductionmentioning
confidence: 99%
“…TDLs emit monochromatic radiation that may be tuned at a high frequency and resolution. This allows for fast and sensitive measurement of trace gas concentrations using a highly focused absorption line (Eng et al, 1980). Most trace gas detection is accomplished using lead-salt diode lasers, which, as a group, can produce light in the wavelength region of 2.5-25 mm (Werle et al, 2002).…”
Section: Introductionmentioning
confidence: 99%
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“…For years tunable lead salt diode lasers (TDL) have been used as light sources in the mid infrared (IR) spectral range between 3 and 20 μm, where characteristic absorption lines of many molecular species are normally located [3,4]. In particular infrared tunable diode laser absorption spectroscopy (IR-TDLAS) has been successfully applied for time resolved studies of CF-, CF 2 -radicals and C 2 F 4 as a stable reaction product in capacitively coupled radio frequency (rf) CF 4 /H 2 pulsed plasmas (13.56 MHz) [1]. Furthermore, based on the simultaneous monitoring of selected absorption lines, a novel method was developed for the time resolved determination of the rotational temperature of the CF 2 radical within a single plasma pulse [2].…”
Section: Introductionmentioning
confidence: 99%
“…The problem of calculating excited state populations in hydrogenic plasmas was first addressed in Reference (10). In this study photoionization of atoms and ions was neglected with relation is the reduced radiation temperature in electron volts, and Ei(x) is the exponential integral.…”
mentioning
confidence: 99%