2020
DOI: 10.3390/nano10081442
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Tunable Infrared Metamaterial Emitter for Gas Sensing Application

Abstract: We present an on-chip tunable infrared (IR) metamaterial emitter for gas sensing applications. The proposed emitter exhibits high electrical-thermal-optical efficiency, which can be realized by the integration of microelectromechanical system (MEMS) microheaters and IR metamaterials. According to the blackbody radiation law, high-efficiency IR radiation can be generated by driving a Direct Current (DC) bias voltage on a microheater. The MEMS microheater has a Peano-shaped microstructure, which exhibits great h… Show more

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Cited by 56 publications
(23 citation statements)
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“…Nanoparticle acts as a wide-angle and multi/wide-band absorber in biosensor. The design of infrared biosensor using metamaterial for specific applications based on geometric parameters have been reported, which include temperature 38 , gas 39 , color 40 and optical 41 sensor.…”
Section: Introductionmentioning
confidence: 99%
“…Nanoparticle acts as a wide-angle and multi/wide-band absorber in biosensor. The design of infrared biosensor using metamaterial for specific applications based on geometric parameters have been reported, which include temperature 38 , gas 39 , color 40 and optical 41 sensor.…”
Section: Introductionmentioning
confidence: 99%
“…Due to their extraordinary properties, metamaterials are becoming an emerging field in physics, chemical, engineering, and electrics subjects. In the recent years, there have been many investigations and reports in various potential applications of metamaterials, such as cloaking devices, high-sensitive environment sensors, perfect absorbers, security screening, tunable ultrahigh-speed filters, imaging devices, high-efficient light emitters, and non-destructive testing [ 3 , 4 , 5 , 6 , 7 , 8 , 9 , 10 ]. Metamaterials show many unique electromagnetic properties including field enhancement [ 11 , 12 ], negative refraction index [ 13 ], artificial magnetism [ 14 ], electromagnetically induced transparency (EIT) [ 15 ], and so on.…”
Section: Introductionmentioning
confidence: 99%
“…The tunable narrowband thermal emitters, which can improve the conversion efficiency of heat energy converting to photon energy, have attracted abundant attention from researchers due to their potential applications, such as solar thermophotovoltaic (STPV) system [ 1 , 2 , 3 , 4 ], radiative cooling [ 5 , 6 , 7 ], infrared stealth [ 8 , 9 , 10 ], IR gas sensing, etc. [ 11 , 12 , 13 ]. Aimed for these applications, emitters with optimized narrowband emission are of vital importance.…”
Section: Introductionmentioning
confidence: 99%