Tunable IR filters using flexible metallic microstructures

Ohnstein, T.; Zook, J. D.; Cox, J. Allen; Speldrich, B.D.; Wagener, T. J.; Guckel, H.; Christenson, Todd R.; Klein, Eric; Glasgow, Ian

doi:10.1109/memsys.1995.472585

Cited by 9 publications

(4 citation statements)

References 4 publications

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“…At the same time, a new type of elastomer actuator is adopted to drive the grating device with the 7.5% pitch tuning range [12,13], but its driving voltage was as high as several thousand volts. On the other hand, some researchers use external actuators such as the linear magnetic drive actuator [14] and shape memory alloy actuator [15] to enlarge the tuning range of their grating devices, but these devices usually require a delicate microassembly process. Other researchers set actuators between reflective slats to prevent the drawback of shared displacement [16].…”

Section: Introductionmentioning

confidence: 99%

A large-displacement thermal actuator designed for MEMS pitch-tunable grating

Yang

Lin

et al. 2008

J. Micromech. Microeng.

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A large-displacement thermal actuator designed for the MEMS pitch-tunable grating device has been designed, simulated, fabricated and characterized in this paper. To avoid the inevitable limits of common thermal actuators developed in the MEMS community, this paper concludes with two design rules and proposes a novel large-displacement thermal actuator based on these two rules. The characterized performance of this thermal actuator shows output displacement at more than 300 μm within the 19 V driving voltage. The grating device with the assistance of this thermal actuator can adjust the pitch continuously from 30 μm to 38 μm with an extension ratio of more than 25%. This thermal actuator could also be integrated easily with other micro devices without the delicate micro-assembly process since its fabrication is compatible with the general semiconductor process.

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Section: Introductionmentioning

confidence: 99%

A large-displacement thermal actuator designed for MEMS pitch-tunable grating

Yang

Lin

et al. 2008

J. Micromech. Microeng.

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“…Waveguide and Y-coupler work has been described by Bauer of IMM [25]. An entire system, a spectrometer for the infrared region, is in the prototype stage at Honeywell, Inc. [26]. The instrument is tunable because the grating acts like a distributed spring with a linear motor-controlled grating spacing.…”

Section: Introductionmentioning

confidence: 99%

High-aspect-ratio micromachining via deep X-ray lithography

Guckel

1998

Proc. IEEE

Self Cite

139

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High-aspect-ratio microsystems technology (HARMST) can be implemented by using thick photoresist technology, which requires X-ray photons for exposure. This was first realized in Germany via the so-called LIGA process. To make this process cost effective, exposures with high-energy photons were introduced in 1993 via a University of Wisconsin-Brookhaven National Laboratory cooperation. The addition of a solvent bonded resist technology and replanarization after electroplating and X-ray mask aligning yield a HARMST processing sequence that uses large-area, sequential X-ray masks without diaphragms. This technology may be applied to precision engineered parts which do not involve electronics. The processing sequence is also used for high performance linear and rotational, magnetic and electrostatic actuators. System applications in optics involve spectrometers and other devices. A discussion of US and world wide efforts in HARMST points at increasing demands for this type of processing tool.

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“…1 Implementation of our concept relies specifically on the sacrificial LIGA ͑SLIGA͒ process pioneered at the University of Wisconsin for fabricating extremely precise metal microstructures with very high aspect ratios and excellent edge acuity. 1 Implementation of our concept relies specifically on the sacrificial LIGA ͑SLIGA͒ process pioneered at the University of Wisconsin for fabricating extremely precise metal microstructures with very high aspect ratios and excellent edge acuity.…”

Section: Introductionmentioning

confidence: 99%

Optical performance of high-aspect LIGA gratings

Cox¹,

Zook²,

Ohnstein³

et al. 1997

Opt. Eng

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LIGA technology has been used to fabricate linear gratings having free-standing nickel walls a few micrometers wide and as much as 50 m high, with period on the order of 10 m. With additional MEMS processing steps, such devices are intended for use in a tunable infrared filter. Prediction of optical performance is a particularly challenging problem for gratings with these parameters and materials and requires a robust Maxwell solver. We have applied our own code, described elsewhere, in the form of a finite-element implementation of the equivalent variational problem, to examine the optical properties of this class of gratings. Here, we describe our predicted results for the transmittance as a function of wavelength and polarization for various grating parameters and incident conditions. Measurements of fabricated gratings were also carried out, and the predictions are shown to agree well with the measured data. The filter cutoff is shown to be sensitive to the cone angle of the incident radiation, and the implications of this effect for system performance are discussed. © 1997 Society of Photo-Optical Instrumentation Engineers. [S0091-3286(97)

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Tunable IR filters using flexible metallic microstructures

Cited by 9 publications

References 4 publications

A large-displacement thermal actuator designed for MEMS pitch-tunable grating

A large-displacement thermal actuator designed for MEMS pitch-tunable grating

High-aspect-ratio micromachining via deep X-ray lithography

Optical performance of high-aspect LIGA gratings

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