Tunable Mechanical Property and Structural Transition of Silicon Nitride Nanowires Induced by Focused Ion Beam Irradiation

Wei, Bin; Deng, Qibo; Yuan, Jun; Wang, Zhongchang; Han, Xiao

doi:10.1021/acsami.0c07737

Cited by 2 publications

(3 citation statements)

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“…As a final practical issue, during the Ga‐FIB irradiation process, the implanted Ga and the induced amorphization and sputtering may compromise the mechanical properties of the final product. [ 50 ]…”

Section: Resultsmentioning

confidence: 99%

“…As a final practical issue, during the Ga-FIB irradiation process, the implanted Ga and the induced amorphization and sputtering may compromise the mechanical properties of the final product. [50] While the previous example shows V-shapes oriented so that the tips move outward while they bend upwards, it is also easy to have other orientations. Figure 4I,J shows circular rings of V-shapes in the opposite orientation.…”

Section: Bending-up Nano-kirigami On 50-nm Thick Si 3 Nmentioning

confidence: 93%

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Nano‐Kirigami Structures and Branched Nanowires Fabricated by Focused Ion Beam‐Induced Milling, Bending, and Deposition

Xia

Notte

2022

Adv Materials Inter

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stress or external forces. The external forces could include capillary force, [6] mechanical force, [7] thermal effects, [8] etc. Additionally, there are methods for the fabrication of 3D functional micro and nanostructures: gas-assisted focused electron beam-induced deposition (FEBID) and focused ion beam-induced deposition (FIBID), both of which use volatile organic and organometallic precursors. [9] Both FEBID and FIBID processes enable the direct-write fabrication of complex 3D nanostructures with feature dimensions below 50 nm, resulting in pore-free, nanometer-smooth high-fidelity structures with increasing choice of deposited materials via novel precursors. FEBID has recently evolved from a trial-anderror laboratory method to a predictable 3D nano-printing technology with unique advantages. [10] Kirigami, the art of cutting and folding a membrane to create versatile shapes, is an example of a transformational process allowing the creation of 3D structures from a 2D membrane. [11] Since the cutting of 2D patterns into a membrane at the nanoscale is well-established in recent years, nano-kirigami has offered new opportunities to explore the applications for 3D optical devices. [11,12] The 3D nano-kirigami and origami structures have promising optical and photonic functionality in giant optical chirality, [13] metasurfaces, [3,14,15] and plasmonics. [16] Commonly, the 2D substrates which are patterned for nanokirigami and origami are metal (e.g., Au), dielectric (e.g., Si 3 N 4 ), or bilayer (e.g Au on Si 3 N 4 ). Typically, these films are less than 100 nm thick and are free-standing, that is, not directly supported by a substrate. The techniques for introducing the precise cuts into these substrates include e-beam method [3,17] and focus ion beam (FIB) milling. [13,14,16] Recent e-beam lithography methods involve photoresist deposition, e-beam exposure, thin film deposition, etching, and removal of photoresist. With e-beam patterning methods, various resist nano-kirigami structures and multiscale metallic patterns can be fabricated with enhanced efficiency and precision to provide more choices of patterning solution for broader applications. [18,19] In contrast, FIB milling is more widely used because it allows for simple and direct writing (cutting) of the patterns on the 2D material. Because of their widespread commercial availability, the gallium FIB (Ga-FIB) is the routine FIB instrument for these 3D nanostructures hold the key to building custom devices with special and flexible functionalities. Ion beam-induced bending and folding are used for the fabrication of 3D nanostructures from prepared 2D nano-patterned membranes. Tensile and compressive stresses can be introduced within the layers of a thin membrane under ion beam irradiation to manipulate and control the formation of nano-kirigamis. Both localized and broader ion beam irradiation can be used to induce bending in the membrane with remarkable control of the bending angle and direction. In this work, an approach to fabricate nano-kirigamis with...

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Section: Resultsmentioning

confidence: 99%

Section: Bending-up Nano-kirigami On 50-nm Thick Si 3 Nmentioning

confidence: 93%

Nano‐Kirigami Structures and Branched Nanowires Fabricated by Focused Ion Beam‐Induced Milling, Bending, and Deposition

Xia

Notte

2022

Adv Materials Inter

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“…[43,44,[53][54][55] In addition, the modulus region of LHFs covered the mechanical requirements for a range of flexible devices (e.g., flexible and stretchable electronics and hydrogel-based electronics and substrates) and soft materials (e.g., kidney, lung, muscle, and cartilage) (Figure 3F). [51,[56][57][58][59][60][61] The advantages of MT-LHFs in terms of the balance of extensibility and modulus were also significant compared to those of previously reported alginate hydrogels containing considerable water content (Figure 3G, Table S3, Supporting Information). [52,[62][63][64][65][66][67][68] Figure 3G shows the modulus/extensibility Ashby plots for most highly hydrated polymers and other engineered "soft" biomaterials, [52] demonstrating that the materials can be divided into two broad classes.…”

Section: Mechanical Reinforcementmentioning

confidence: 96%

Embedding Living Cells with a Mechanically Reinforced and Functionally Programmable Hydrogel Fiber Platform

Peng,

Ba,

et al. 2023

Advanced Materials

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Living materials represent a new frontier in functional material design, integrating the synthetic biology tools to endow materials with programmable, dynamic and life‐like characteristics. However, a major challenge in creating living materials is balancing the tradeoff between structural stability, mechanical performance, and functional programmability. To address this challenge, we propose a sheath‐core living hydrogel fiber platform that synergistically integrates living bacteria with hydrogel fibers to achieve both functional diversity and structural and mechanical robustness. In the design, microfluidic spinning was used to produce hydrogel fiber, which offers advantages in both structural and functional designability due to their hierarchical porous architectures that can be tailored and their mechanical performance that can be enhanced through a variety of post‐processing approaches. By introducing living bacteria, we endowed the platform with programmable functionality and life‐like capabilities. This work reconstructed the genetic circuits of living bacteria to express chromoproteins and fluorescent proteins as two prototypes that enabled the coloration of living fibers and sensing water pollutants by monitoring the amount of fluorescent protein expressed. Altogether, this study established a structure‐property‐function optimized living hydrogel fiber platform, providing a new tool for accelerating the practical applications of the emerging living material system.This article is protected by copyright. All rights reserved

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Tunable Mechanical Property and Structural Transition of Silicon Nitride Nanowires Induced by Focused Ion Beam Irradiation

Cited by 2 publications

References 50 publications

Nano‐Kirigami Structures and Branched Nanowires Fabricated by Focused Ion Beam‐Induced Milling, Bending, and Deposition

Nano‐Kirigami Structures and Branched Nanowires Fabricated by Focused Ion Beam‐Induced Milling, Bending, and Deposition

Embedding Living Cells with a Mechanically Reinforced and Functionally Programmable Hydrogel Fiber Platform

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