We propose a scheme to generate one-way steering, bipartite and genuine tripartite entanglement in a five-mode hybrid cavity electro-optomechanical system
consisted of an optical cavity, a mechanical resonator, and three microwave cavity modes with the help of a squeezed vacuum field.
The optical cavity is pumped by a squeezed vacuum field.
The mechanical resonator is formed by a freely vibrating silicon nitride membrane which is a part of a
capacitor in a inductor-capacitor circuit forming three microwave resonators.
We find that there is robust entanglement and one-way steering between the optical cavity mode and microwave cavity modes in the presence of
the squeezed vacuum field. Particularly, there is steady-state genuine tripartite entanglement between three microwave cavity modes which is robust against thermal fluctuations.
Our scheme could be useful for various quantum tasks based on hybrid electro-optomechanical systems fabricated on chips.