Tunable Pneumatic Microoptics

Werber, A.; Zappe, Hans

doi:10.1109/jmems.2008.928712

Cited by 53 publications

(35 citation statements)

References 17 publications

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“…This can result in a wider range of tuning effects on the structure, not limited to simply acting as a switch or filter. Pneumatic switching can occupy less space than MEMS switches since pneumatic chamber walls and membranes can be made fractions of a micrometer thick [11,12]. Hence the switching elements can be made smaller and closer together to achieve greater tuning flexibility.…”

Section: Introductionmentioning

confidence: 99%

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Reconfigurable Fishnet Metamaterial Using Pneumatic Actuation

Khodasevych¹,

Rowe²,

Mitchell³

2012

PIER B

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Abstract-The design, fabrication and measurement of a reconfigurable fishnet metamaterial based on a new method of tuning by changing unit cell geometry is reported. Retractable elements are added to the unit cell utilizing pneumatically actuated switching. It is shown that the pneumatic actuation approach can unite a number of metallic elements into a complex conducting structure. Experimental demonstration confirms that the structure operates at two different frequencies in the GHz range in distinct actuation states. The measured results also show good agreement with numerical simulations.

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Section: Introductionmentioning

confidence: 99%

“…Pneumatic micropumps are widely used in microfluidics [11] and microoptics [12] however the application of pneumatic switching to microwave elements is novel. This paper will experimentally demonstrate a pneumatic switching technique on a fishnet metamaterial for the first time.…”

Section: Introductionmentioning

confidence: 99%

Reconfigurable Fishnet Metamaterial Using Pneumatic Actuation

Khodasevych¹,

Rowe²,

Mitchell³

2012

PIER B

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“…In MOEMS, focus is often on mechanical actuation and movement of optical components, using electrostatic, thermal, magnetic or even pneumatic means [46] . The parallel fabrication processes employed again play a major role in defi ning the relevance of MOEMS: complex optical systems may be realized at lower cost than could be achieved using some sort of manual assembly.…”

Section: Moemsmentioning

confidence: 99%

Micro-optics: a micro-tutorial

Zappe

2012

Advanced Optical Technologies

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Micro-optics represents a rich discipline with many features not found in classical optics. Yet micro-optics is not merely ' small optics ' . Using the technologies of microfabrication, entirely new fabrication processes, new materials and new types of optical devices have been conceived. Here, we provide a brief introduction to the fi eld, discussing a variety of miniaturized optical components, as well as the materials from which they are made and the novel technologies used to fabricate them. Designed as a tutorial, this brief pr é cis includes adequate literature references to guide the interested reader to more in-depth treatments.

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“…Zappe's group has reported pneumatic tuning of PDMS lens arrays. 9,10 The technique is effective, but all lenses move simultaneously. The technique is aimed at small arrays or single lenses, and allows for low voltage operation when coupled with their thermo-pneumatic actuator.…”

Section: Introductionmentioning

confidence: 99%

Array of lenses with individually tunable focal-length based on transparent ion-implanted EAPs

Niklaus

Rosset

Shea

2010

Electroactive Polymer Actuators and Devices (EAPAD) 2010

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We report on the fabrication and characterization of 2x2 arrays of mm-diameter PDMS lenses whose focal length can be electrically tuned. Dielectric elastomer actuators generally rely on carbon powder or carbon grease electrodes, which are not transparent, precluding the polymer actuator from also being a lens. However compliant electrodes fabricated by low-energy ion implantation are over 50% transparent in the visible, enabling the polymer lens to simultaneously be an actuator. We have developed a chip-scale process to microfabricate lens arrays, consisting of a molded socket bonded to a Pyrex chip supporting 4 membrane actuators. The actuators are interconnected via an incompressible fluid. The Pyrex chip has four through-holes, 1 to 3 mm in diameter, on which a 30 µm thick Polydimethysiloxane (PDMS) layer is bonded. The PDMS layer is implanted on both sides with 5 keV gold ions to define the transparent electrodes for EAP actuation. Applying a voltage to one of the lens/actuators leads to an area expansion and hence to a change in radius of curvature, varying the focal length. We report tuning the focal length from 4 mm to 8 mm at 1.7 kV, and present changes in optical transmission and membrane stiffness following gamma and proton irradiation.

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Tunable Pneumatic Microoptics

Cited by 53 publications

References 17 publications

Reconfigurable Fishnet Metamaterial Using Pneumatic Actuation

Reconfigurable Fishnet Metamaterial Using Pneumatic Actuation

Micro-optics: a micro-tutorial

Array of lenses with individually tunable focal-length based on transparent ion-implanted EAPs

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