Tunable Surface Acoustic Wave Filter Using Integrated Micro-Electro-Mechanical-System Based Varactors Made of Electroplated Gold

Konno, Akira; Hirano, Hideki; Inaba, Masahiro; Hashimoto, Ken-ya; Esashi, Masayoshi; Tanaka, Shuji

doi:10.7567/jjap.52.07hd13

Cited by 12 publications

(7 citation statements)

References 19 publications

(19 reference statements)

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“…In this section an overview of recent research in the design of high performance switchable and reconfigurable BAW and SAW filter technologies is given. For example, [85], [86], [87], [88], [89], [90] describe research on the design of tunable and reconfigurable acoustic filters by incorporating switches as well as varactors within the acoustic devices. Another attractive approach is to integrate both switching and filtering functionalities onto a single device instead of the combination of switchplexers and conventional BAW filters.…”

Section: Tunable and Reconfigurable Acousticsmentioning

confidence: 99%

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

et al. 2023

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This paper reviews the latest developments in microwave acoustic wave devices. After an introduction and brief history of bulk acoustic wave (BAW) and surface acoustic wave (SAW) devices, a review is given for guided SAWs and XBARs -two new technologies, which are promising for future 5G applications. Following this, we discuss recent simulation techniques, such as 3D finite element method (3D FEM) and simulation of nonlinearities, as well as filter synthesis. Next, a review on tunable and reconfigurable acoustics is given. Finally, we present the latest developments in microwave acoustics for millimeter-wave (mm-wave) operation as well as BAW oscillators.INDEX TERMS Bulk acoustic wave (BAW) devices, filter, filter-synthesis, front-end, high power, MTT 70th Anniversary Special Issue, multiplexer, nonlinearity, resonator, surface acoustic wave (SAW) devices.

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Section: Tunable and Reconfigurable Acousticsmentioning

confidence: 99%

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

et al. 2023

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“…Micro-tunable capacitors are miniature micro-sized structures that find various applications ranging from wireless systems to even high frequency-based circuits. They have attracted the attention of several researchers resulting into the publication of a significant research work [1][2][3][4][5] mainly devoted into considering these tiny structures in the design of numerous devices such as voltage control micro-oscillators [6,7], micro-filters [8][9][10], super-heterodyne micro-transceivers [11], etc… Tunability represents one of most important characteristics for micro-tunable capacitors, which is mainly be governed by the difference between their respective maximum and minimum capacitance values. The more the maximum capacitance is accomplished, the higher the tunability is.…”

Section: Introductionmentioning

confidence: 99%

On the implementation of adaptive sliding mode robust controller in the stabilization of electrically actuated micro-tunable capacitor

et al. 2020

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Parallel-plates based micro-tunable capacitors are known to have low travel range, which worsen as going even lower in terms of their initials gap sizes. Such conditions have put strict requirements on the operation of such designs and hence hindering their use in numerous practical applications requiring high tunability. This work is proposed to examine the possibility to implement a closed-loop control strategy to increase the maximum capacitance and therefore tunability of micro tunable capacitors. The suggested control strategy is implemented on an electrostatically actuated parallel-plates (one stationary and one movable) based micro-capacitor and had an objective to stabilize the movable electrode when it is close to the fixed one for the sake of maximizing its maximum capacitance and possibly improving its overall tunability. Robustness of the micro-capacitor to the so-called pull-in phenomenon (short-circuit instability) when using the closed loop control scheme is studied. Indeed, an adaptive sliding mode controller is designed to compensate the effects of uncertainty, disturbance and eliminate any possibility for chattering phenomenon. The controller proficiencies in terms of stabilizing the micro-capacitor and its robustness to uncertainty as well as disturbance have been thoroughly examined. Furthermore, the effects of the control parameters on the behavior of micro-capacitor, such as overshoot, settling time, steady state error, robustness to uncertainty, external disturbances and to the chattering phenomenon, have been completely inspected. The obtained results indicated satisfactory proficiency and trustworthiness of the proposed control strategy to achieve high level of tunability and maximum capacitance.

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“…To solve this problem, a cognitive radio system using a vacant frequency band of digital television (DTV) channels (TV white space) are receiving a lot of attention. [1][2][3][4][5][6] Figure 1 shows DTV channel structure from 470 to 710 MHz in Japan, which is composed of 40 channels with 6 MHz bandwidth for each. However, only a limited number of channels are actually used, depending on areas.…”

Section: Introductionmentioning

confidence: 99%

Simulation of solidly mounted plate wave resonator with wide bandwidth using 0-th shear horizontal mode in LiNbO₃plate

Kadota¹,

Tanaka²

2015

Jpn. J. Appl. Phys.

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A cognitive radio system using a vacant frequency band of digital TV channels (TV white space) requires a tunable filter with wide tunable ranges of center frequency and bandwidth. An ultra-wideband resonator is a key device to implement the tunable filter, because the tunable range is limited by the bandwidth (BW) of the resonators. A 0-th shear horizontal (SH0) mode plate wave resonator using an ultra-thin LiNbO3 plate is known to have a large electromechanical coupling factor, i.e., a large BW, but the structural fragility of the ultra-thin LiNbO3 plate is problematic. In this study, the feasibility of solidly mounted resonator type SH0 mode plate wave resonator was investigated systematically by finite element method simulation. The design parameters including the Euler angle, thickness of a LiNbO3 plate, and the material and thickness of an interdigital transducer were optimized. With the best design, a BW as wide as 26% is obtained.

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Tunable Surface Acoustic Wave Filter Using Integrated Micro-Electro-Mechanical-System Based Varactors Made of Electroplated Gold

Cited by 12 publications

References 19 publications

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

On the implementation of adaptive sliding mode robust controller in the stabilization of electrically actuated micro-tunable capacitor

Simulation of solidly mounted plate wave resonator with wide bandwidth using 0-th shear horizontal mode in LiNbO₃plate

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Tunable Surface Acoustic Wave Filter Using Integrated Micro-Electro-Mechanical-System Based Varactors Made of Electroplated Gold

Cited by 12 publications

References 19 publications

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

On the implementation of adaptive sliding mode robust controller in the stabilization of electrically actuated micro-tunable capacitor

Simulation of solidly mounted plate wave resonator with wide bandwidth using 0-th shear horizontal mode in LiNbO3plate

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Simulation of solidly mounted plate wave resonator with wide bandwidth using 0-th shear horizontal mode in LiNbO₃plate